JUKI FX-3R MAINTENANCE GUIDE.pdf - 第34页
FX-3R Maintenance Guide 3-2 Tightening torque: 0.15 ± 0.02 N ⋅ m SV cover Cable guide 40046835 Solenoid valve 40068170 Solenoid valve B 40068169 Solenoid valve V Round head scre w f ( × 2) c SL6030692TN SEMS cap bolt wit…
FX-3R Maintenance Guide
3-1
DANGER
To prevent any trouble caused by accidental machine start, always
shut-down the power before starting the maintenance and
adjustment work.
The XY-axis uses a very strong magnet.
• Do not put any metallic object close to the magnet surface. Once the
magnet attracts a metallic object, this object cannot be removed due to
strong magnetic force.
• Before starting the maintenance work, take off precision portable devices,
such as a wrist watch from your body.
• Do not allow personnel who uses a precision medical device, such as an
artificial cardiac pacemaker, etc to carry out the maintenance work.
[3] PARTS AROUND THE HEAD
3-1. Replacing the Solenoid Valves
Before replacing the solenoid valves, always shut-down the main compressed air.
1) Remove the SEMS cap bolts c (×2) and SEMS cap bolts d (×2) to detach the SV cover and
cable guide.
2) Remove the SEMS cap bolts e (×2), and disconnect the cables and air tubes to detach the
solenoid valve main unit.
3) Remove the round head screws f (×2) to detach each solenoid valve. (Great care should be
taken so that the gasket on the back of the solenoid valve is not lost.)
4) Reassemble the parts and components in the reverse order of disassembly.
5) After the solenoid valves have been replaced, check the solenoid valves through the head
vacuum and the blow ON/OFF of the manual control.
∗ Round head screws f (2 pcs.) and gasket (1 pc.) are accessory parts supplied with each
solenoid valve.
Rev. 1.00
FX-3R Maintenance Guide
3-2
Tightening torque: 0.15±0.02 N⋅m
SV cover
Cable guide
40046835
Solenoid valve
40068170
Solenoid valve B
40068169
Solenoid valve V
Round head screw f (
×
2)
c SL6030692TN
SEMS cap bolt with washer
M3×6
d SL6030692TN
SEMS cap bolt with washer
M3×6
e SL6030692TN
SEMS cap bolt with washer
M3×6
Figure 3-1-1 Replacing the Solenoid Valves
Rev. 1.00
FX-3R Maintenance Guide
3-3
3-2. Replacing the Filter
Before replacing the filter, always shut-down the main compressed air.
<Replacing the head filter>
1) Remove the cap bolts c (×2) and cap bolts d (×2) to detach the filter box U.
(O-ring is mounted under the filter box U. Carefully handle this O-ring so that it is not lost.)
2) Take out the filter and replace it with a new one.
3) Reassemble the parts and components in the reverse order of disassembly.
4) After the filter has been replaced, check the filter through the head vacuum and the blow
ON/OFF of the manual control.
<Replacing the filter for release to atmosphere>
1) Remove the SEMS cap bolts e (×2) to detach the SV cover.
2) Loosen the SEMS cap bolts f (×2) to detach the filter for release to atmosphere.
(You can detach the filter only by loosening the SEMS cap bolts.)
3) Reassemble the parts and components in the reverse order of disassembly.
∗ SEMS cap bolts f (2 pcs.) are accessory parts supplied with the solenoid valve.
c Tightening torque: 0.9N
⋅
m
d SM6034002TN
SEMS cap bolt M3×40
d Tightening torque: 0.6N
⋅
m
E3052729000
Head filter
e SL6030692TN
SEMS cap bolt with washer
M3×6
40068171
Filter for release to
atmosphere
SEMS cap bolt f (
×
2)
c SM6031602TN
SEMS cap bolt M3×16
Figure 3-2-1 Replacing the Head Filter
Rev. 1.00