196396 Iss 2 Nov 2015 - Semi Appendix Manual - 第34页
Appendix to Micron Technical Manuals
Appendix to Micron Technical Manuals
APPENDIX C
Technical Reference
Information
Appendix to Micron Technical Manuals
EMERGENCY MACHINE OFF (EMO) MODULE
OVERVIEW
Chapter Issue 2, Nov 14 Technical Reference Manual 5.1
CHAPTER 5 EMERGENCY MACHINE OFF (EMO) MODULE
OVERVIEW
Item Description Item Description
1 M39 Emergency Machine Off Enclosure 3 Rear Emergency Machine Off Switch
2 Front Emergency Machine Off Switch 4 Start Button
A
View on Arrow A
2
3
4
1