d-YTF_V2_kgw_e(after 2006Sep).pdf - 第3页

在线预览 d-YTF_V2_kgw_e(after 2006Sep).pdf PDF 文档。

d-YTF (KGW)

Mounter-d-YTF interface 1

Mounter-d-YTF interface 2

I/O TF BOARD A -1-

I/O TF BOARD A -2-

I/O TF BOARD A -3-

Indicator assy sel

Emergency circuit

DZ axis cut off circuit

Air circuit

Wiring parts list

Table of contents

Conﬁ dential & Proprietary

P. 1

P. 2

P. 3

P. 4

P. 5

P. 6

P. 7

P. 8

P. 9

P.10