00194440-10_SM_X-Series_Customer_en - 第278页
Settings Axis Control 5.2.3 C&P6/12 278 Service Manua l SIPLACE X Series 5.2.3 5 . 2 . 3 C & P 6 / 1 2 C&P6/12 5.2.3.1 5 . 2 . 3 . 1 O v e r v ie w o f A x is C o n t r o l f o r S t a r , Z a n d D P A x is …
Settings
5.2.2 Checking the Y Axis Dynamics Axis Control
Service Manual SIPLACE X Series 277
1. Axis start
2. The end position signal is triggered at different times, depending on the axis records for the three
head configurations.
5.2.2.3
5.2.2.3 Y Axis Travel Time Table, According to Placement Heads
Y Axis Travel Time Table, According to Placement Heads
Y gantry axis travel times for the various head configurations
5.2.2.4
5.2.2.4 Travel Time Table for C&P20A Y Axis
Travel Time Table for C&P20A Y Axis
CAUTION
Maximum deviation of position
The maximum deviation of position depends on the placement head:
► C&P20A: 12 µm (digit)
► CPP: 10 μm (digit)
► TwinHead: 5 μm (digit)
Y gantry axis with C&P20 Y gantry axis with DLM2
(C&P6, C&P12)
Y gantry axis with TwinHead
Distance /
digit
Target time /
ms
Tolerance /
ms
Target time /
ms
Tolerance /
ms
Target time /
ms
Tolerance /
ms
50027+/-538+/-535+/-5
1000 31 +/-5 39 +/-5 40 +/-5
2000 41 +/-5 42 +/-5 46 +/-5
5000 50 +/-5 49 +/-5 53 +/-5
15000 68 +/-5 66 +/-5 68 +/-5
20000 76 +/-5 73 +/-5 76 +/-5
50000 106 +/-10 101 +/-10 108 +/-10
100000 153 +/-10 144 +/-10 147 +/-10
200000 198 +/-10 195 +/-10 199 +/-10
600000 335 +/-15 352 +/-15 357 +/-15
Distance / digit Y gantry axis with C&P20A
Target time / ms Tolerance /ms
600 27 +/- 5
1000 30 +/- 5
2000 31 +/- 5
5000 45 +/- 5
15000 64 +/- 5
20000 71 +/- 5
50000 101 +/- 5
100000 138 +/- 5
200000 175 +/- 5
300000 213 +/- 5
Settings
Axis Control 5.2.3 C&P6/12
278 Service Manual SIPLACE X Series
5.2.3
5.2.3 C&P6/12
C&P6/12
5.2.3.1
5.2.3.1 Overview of Axis Control for Star, Z and DP Axis
Overview of Axis Control for Star, Z and DP Axis
Positioning time for C&P12
Positioning Time for C&P12
Star axis control system
The closed-loop control system for control of the head
axes consists of the following parts. The differences be-
tween the head axes will be explained later in this chap-
ter.
▪ Axis card A363 with VC3 controller or A364
▪ Servo card (SDS)
▪ Motor
▪ Measurement system (incremental scale and encod-
er (read unit)
1. Axis controller board A363 with VC3 controller (VC =
Velocity Commutation)
2. Control signals I target "W" and I target "U"
3. LEDs on servo amplifier:
4. Servo amplifier
5. 3 phase AC motor.
6. Between the motor and the incremental encoder
there is a fixed mechanical connection.
7. Incremental encoder: transmits the exact position of
the axis to the axis card. (The track signals are the
only feedback signals for the axes).
The servo board controls the motor directly.
Axis Mode/range Standard position-
ing time
Positioning time
DLM3 with SW603
Star Axis continuous run / 1 star step 46 ms +/-3 ms 43ms +/-3ms
Z Absolute, free space / 685 digits 24 ms, -1 ms 21ms, -1ms
Z Light barrier, in calibration tool pocket / approx.
685 digits
24 +/-3 ms 21 +/-3ms
DP 100 digits 13 ms +/-3 ms 13 ms +/-3 ms
DP 3600 digits 43ms +/-3ms 39 ms +/-3 ms
Settings
5.2.3 C&P6/12 Axis Control
Service Manual SIPLACE X Series 279
Positioning time for C&P6
Positioning time for C&P6
5.2.3.2
5.2.3.2 Track Signals for Head Axes
Track Signals for Head Axes
The track signals play a greater role with the new drive concept for HF machines. They are responsible
for the precise positioning of the axes and are used as the only feedback signal in the closed-loop control
system, meaning that they have an important influence on the axis dynamics.
Overview
Oscilloscope settings
Measurement Setup
The head axis track signals can only be measured as digital signals i.e. the analog signals are converted
into digital signals in the read unit.
Axis Mode/range Positioning time
Star Axis continuous run / 1 star step 70 ms +/-3 ms
Z Absolute, free space / 685 digits 30 +/-3 ms
Z Light barrier, into calibration tool pocket / approx. 685 digits 30 +/-3 ms
DP 200 digits 38 ms +/-3 ms
DP 7200 digits 85 ms +/-3 ms
Axes Mechanical settings Oscilloscope diagram
Star 25x: resolution 1/1000° Digital track signal amplitude 3.6Vpp
Z nothing Digital track signal amplitude 3.6Vpp
DP Incremental encoder set to 1.5 mm, paral-
lel to the glass
Digital track signal amplitude 3.6Vpp
General measurement structure for checking track sig
-
nals
1. Intermediate distributor SP 6-12, digital
2. X13: track signals Z axis
3. X15: track signals star axis
4. X16: track signals DP axis
Assignment of connectors X13, X15, X16:
1. Ground
2. Track A
3. Track A
4. Ground
5. Track B
6. Track B
7. +5V
8. Track N
9. Track N
10. Removed