P228001e.pdf - 第35页
MODEL TIM-5000 9905-001 C-6 Key No. PART No. PART NAME Q'ty REMA RKS 501 630 069 0071 COVER(L) 1 502 630 076 8992 COVER 1 566 411 141 4107 W ASHER V 5X10X1 10 FW 5 567 411 141 6705 W ASHER SPR 5 10 SW 5 568 630 000 …
MODEL TIM-5000
9905-001
2 ビームＸＹ部 2-BEAM XY SECTION
Fig. C-6 ボールネジカバー Ball Screw Cover
See Fig.B-1
Key No.2
See Fig.B-1
Key No.3
566
567
568
568
501
567
566
502
MODEL TIM-5000
9905-001
C-6
Key No. PART No. PART NAME Q'ty REMARKS
501 630 069 0071 COVER(L) 1
502 630 076 8992 COVER 1
566 411 141 4107 WASHER V 5X10X1 10 FW5
567 411 141 6705 WASHER SPR 5 10 SW5
568 630 000 7732 BOLT,HEX-SCT 10 M5X8
NOTE
MODEL TIM-5000
9905-001
真空ポンプ部 VACUUM PUMP SECTION
Fig. E-1 真空ポンプ Vacuum Pump