SM310_Technical-4th(User) - 第11页

S A MS U N G T E C H W I N Feeder󰚟Base Feeder󰚟Base REAR FRONT Manifold󰚟Ass'y󰚟(ST) Air󰚟Filter󰚟Ass'y Regulator Air󰚟SOL󰚟Valve󰚟Ass'y 8 4 5 1 0 4 -C 4 -E 8 -D 4 -C 4 -A 4 -B 4 -D 1 5 7 2 1 0 1 0 1 0 1 …

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S AMS UNG TE CHWIN
BLUE
BLUE
PLUG[PT󰚟3/8]
KQ2VD04-02S
KQ2H06-00
AFM4000-04C
ASP330F-01-06S
U2-4-6*4
U2-4-4*2.5
J9057168A
AS2201F-01-06S
2-KQ2L06-M5
U2-4-4*2.5
KQ2S04-M5
4-PT18EF
J9057172A
KQ2S04-M5
GP46-10-01L5
KQ2E04-01S
VXD2140-04-5G-B
KQ2T10-12
KQ2H12-04
KQ2VD06-02S
KQL04-M5
KQL08-03S
PL12-03
KQL12-04
KQ2L12-04
TAR4000-04
J6709012A
MANIFOLD󰚟ASS'Y󰚟(DC)
J9058094A
KQU08-00
KQL12-04
AF40-04BC
Feeder󰚟Base󰚟(DC)
Rear󰚟Gantry󰚟Air󰚟Module
KQ2H06-00
KQ2U08-10
KQ2R06-08
AR08-T2-D0M0-J199A
WR0640
Flat󰚟Tube-X,󰚟J7358003A
Front󰚟Gantry󰚟Air󰚟Module
X10X6CF
Vacuum󰚟Chamber
F-3120-20
F-3120-85
F-3120-80
F-3120-85
F-3120-85
Vacuum󰚟Chamber
F-3120-80
F-3120-85
F-3120-20
F-3120-20
F-3120-85
F-3120-80
Vacuum󰚟Chamber
F-3120-85
F-3120-85
F-3120-80
F-3120-85
F-3120-20
Vacuum󰚟Chamber
F-3120-20
F-3120-85
F-3120-80
Vacuum󰚟Chamber
F-3120-85
F-3120-85
F-3120-80
F-3120-85
F-3120-20
Vacuum󰚟Chamber
KJS01-32
F-3120-85
Head󰚟1
F-3145-80
F-3145-80
F-3145-80
Pressure󰚟Sensor
F-3145-80
F-3145-80
Pressure󰚟Sensor
Blow󰚟Manifold
J7254040B
AF100-KRU0638
KQ2H23-M5
J9058076A
KQ2H23-M5
AF100-KRU0638
Filter󰚟Assy
Head󰚟2
Head󰚟4
Filter󰚟Assy
AF100-KRU0638
KQ2H23-M5
J9058076A
J9058076A
KQ2H23-M5
AF100-KRU0638
Filter󰚟Assy
Pressure󰚟Sensor
F-3145-80
F-3145-80
Pressure󰚟Sensor
Head󰚟3
Head󰚟6
Filter󰚟Assy
AF100-KRU0638
KQ2H23-M5
J9058076A
J9058076A
KQ2H23-M5
AF100-KRU0638
Filter󰚟Assy
Pressure󰚟Sensor
F-3145-80
F-3145-80
Pressure󰚟Sensor
Head󰚟5
KJS01-32
KJS01-32
J9080340A
HEAD󰚟SOL󰚟ASSY󰚟#1
J9080341A
HEAD󰚟SOL󰚟ASSY󰚟#2
F-3120-70
F-3120-70
F-3120-70
F-3120-70
F-3120-70
F-3120-70
J9058076A
Filter󰚟Assy
KQ2L04-M5
KPT18
KQ2H08-01S
AS1211F-M5-06
AN101-01
Front󰚟BUT
CXSM25-KRU0004-30-A93L
SYS3120-04-KRIW2703
J9058093A
AN101-01
KQ2L04-M5
KQ2S04-M5
BDAS10X10_1A_ZC153A2
Front󰚟ANC
M-5AU-4
CDQSB12-25DC-A93L
Inlet󰚟Stopper
AS1211F-M5-04
CQ2B6-2-KRIC1761
Front󰚟Edge󰚟Fixer
MHY2-01-IU2054-D-M9N(3m)
Front󰚟Wokr󰚟Stopper
KQ2L04-M5
KQ2L06-M5
M-5ALN-4
AS1301F-M5-04
KQ2L04-M5
M-5AU-4
AR1000-M5BG
FRONT REAR
AR1000-M5BG
M-5AU-4
KQ2L04-M5
AS1301F-M5-04
M-5ALN-4
AS1211F-M5-06
KQ2L04-M5
Front󰚟Wokr󰚟Stopper
MHY2-01-IU2054-D-M9N(3m)
Front󰚟Edge󰚟Fixer
CQ2B6-2-KRIC1761
AS1211F-M5-04
Inlet󰚟Stopper
CDQSB12-25DC-A93L
M-5AU-4
Front󰚟ANC
BDAS10X10_1A_ZC153A2
KQ2S04-M5
KQ2L04-M5
AN101-01
J9058093A
SYS3120-04-KRIW2703
CXSM25-KRU0004-30-A93L
Front󰚟BUT
KQ2L06-M5
AN101-01
KQ2H08-01S
KPT18
SYS3120-5LZ-M5
VQ110U-5MO
VQ110U-5MO
SYS3120-5LZ-M5
KQ2L04-M5
KQ2L04-M5
SYS3120-5LZ-M5
SYS3120-5LZ-M5
SYS3120-5LZ-M5
KQ2L04-M5
AS1301F-M5-04
M-5ALN-4
KQ2L06-M5
KQ2L04-M5
KQ2L04-M5
KQ2L04-M5
AS1211F-M5-06
KQ2L06-M5
M-5ALN-4
AS1301F-M5-04
KQ2L04-M5
KQ2L04-M5
KQ2L04-M5
AS1211F-M5-06
KQ2L04-M5
KQ2L04-M5
KQ2L04-M5
KQ2L04-M5
SYS3120-5LZ-M5
SYS3120-5LZ-M5
SYS3120-5LZ-M5
KQL12-04
J9058092A-AIR󰚟FILTER󰚟ASS'Y
KQ2L12-04
PLUG[PT󰚟3/8]
PLUG[PT󰚟3/8]
KQL12-04
J9057171A󰚟FEEDER󰚟BASE󰚟ASSY(REAR-DC)
J9057166A󰚟FEEDER󰚟BASE󰚟ASSY(FRONT-DC)
3-PT󰚟1/8
AKH06-00
*BUYD06-04
*KQ2U06-00
KQ2L06-01
U2-4-4*2.5
U2-4-4*2.5
KQ2U06-00
AN101-01
KD-M5-SA34697KR
2-
KS-4-M5-SA34698KR
S AMS UNG TE CHWIN
Feeder󰚟Base Feeder󰚟Base
REAR
FRONT
Manifold󰚟Ass'y󰚟(ST)
Air󰚟Filter󰚟Ass'y
Regulator
Air󰚟SOL󰚟Valve󰚟Ass'y
8
4
5
10
4-C
4-E
8-D
4-C
4-A
4-B
4-D
1
5
7
2
10
1010
11
11
8-A
8-F 8-F
8-B
8-E
8-G
8-B
8-B 8-C
3
5
5
6
9
NO. PART󰚟NO. PART󰚟NAME Q'TY TYPE REMARK
1 J6709012A REGULATOR󰚟 1
2 J6711116A BULKHEAD󰚟UNION󰚟FITTING󰚟 1
3 J6711154A UNION󰚟Y󰚟 1
4 J9058092A SM310󰚟AIR󰚟FILTER󰚟ASSY 1 J9058092A
4-A J6708016A AIR󰚟FILTER 1
4-B J6708010A OIL󰚟FILTER(CP-60󰚟OPTION) 1
4-C J6711045A ELBOW󰚟FITTING 2
4-D J6719055A SPACER 1
4-E J7500010A COUPLER󰚟 1 J7500010A
5 J1301187 ELBOW󰚟FITTING󰚟 4
6 J9061959D AIR󰚟SOL󰚟VALVE󰚟ASSY 1
6-A J6702026A SOLENOID󰚟VALVE 1
7 J90610608C AIR󰚟DOWN󰚟SNS󰚟CABLE󰚟#11󰚟 1
7-A J1300995 PRESSURE󰚟GAGE󰚟 1
8 J9058040B (CP-60)MANIFOLD󰚟ASSY(ST) 1 J9058040B
8-A J1301188 FITTING󰚟 1
8-B J1301213 PLUG󰚟 3
8-C J1301364 ELBOW󰚟FITTING󰚟 1
8-D J6711059A STRAIGHT󰚟FITTING󰚟 1
8-E J6711134A BOW󰚟FITTING󰚟 1
8-F J6711152A FITTING󰚟 2
8-G J7158003B MANIFOLD󰚟 1 J7158003B
9 J6711181A UNION󰚟Y󰚟 1
10 J1301188 FITTING󰚟 4
11 J1301430 FITTING󰚟 2
12
13