CX200-4(Maint) - 第28页
Fig. 4A17 X/Y T able Section 1.3 Maintenance Spots 01 10-003 1-17 AFO01ETRP

(7) X/Y Table Section
1.3 Maintenance Spots
01 10-003 1-16 AFO01ETRP
Fig. 4A16

Fig. 4A17 X/Y Table Section
1.3 Maintenance Spots
0110-003 1-17 AFO01ETRP

(8) Light Source Device for Component Recognition
1.3 Maintenance Spots
0110-003 1-18 AFO01ETRP
Fig. 4A18
Fig. 4A19