Oxford-100-ICP-2-Step-DRIE-SOP-in-PDF-Format.pdf - 第10页

Oxford ICP 2 - step DRIE SOP Page 10 of 10 Revisi on 2- 12 0 321 9. Revision Histo ry Rev Date Or iginator Descrip tion o f Cha nges 1 01 Jun 2010 Sam Bell 2 13 Dec 2021 Brian Baker

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8. Shutdown Procedures
8.1 Vent Load Lock
8.1.1 Click OK when the software says “Process completed”.
8.1.2 Look inside load lock window to make sure wafer has transferred successfully from main
chamber to load lock.
8.1.3 Vent load lock.
8.1.3.1 Press stop button corresponding to the load lock mechanical pump. See Figure 4.
8.1.3.2 Click ok when it says “Wafer has finished processing”.
8.1.3.3 Press vent button. See Figure 4.
8.1.3.4 Wait ~1 min. for the load lock to vent.
8.1.4 Pull up to open load lock lid. Do not force it open, once it is vented it should open easily.
8.1.5 Press stop button to stop venting.
8.1.6 Remove wafer.
8.2 Shutdown System
8.2.1 Set the chuck temperature to 30C. This is important! Otherwise the N2 dewar will run out
overnight and you will be billed for a new tank.
Reflected
Power
Figure 4, Process Control Page
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8.2.1.1 Click on Process icon. See Figure 1, Pump Control Page.
8.2.1.2 Click on “Chamber 1” on the drop-down menu
8.2.1.3 Set the table temperature to 30 (lower left corner of screen) See Figure 1.
8.2.1.4 Press the pink start button, then immediately click stop (right next to it). See Figure 1.
8.2.1.5 Double check to make sure the bottom temperature setpoint on the controller reads 30.
Figure 8. Temperature controller set to 30C
8.2.2 Run the Standby recipe to pump down the empty load lock.
8.2.2.1 Close load lock lid.
8.2.2.2 Load the “Standby” recipe
8.2.2.3 Run the Standby recipe
8.2.2.4 Important: Press ‘cancel’ when software asks for wafer name. Do not click ok or enter a
name or the system will get confused and think there is a wafer inside.
8.2.2.5 Enter run data, measurements, and disable tool in Coral.
Figure 9. Run standby recipe to shutdown system
Oxford ICP 2-step DRIE SOP Page 10 of 10
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9. Revision History
Rev
Date
Originator
Description of Changes
1
01 Jun 2010
Sam Bell
2
13 Dec 2021
Brian Baker