FX-3-Rev12(-J) - 第6页
- 1 - MAIN UNIT 本体 1. BASE FRAME COMPONENTS(1) ベースフレーム関係(1) 2 7 5 4 3 9 8 10 6 6 6 6 17 18 12 13 15 14 16 20 22 21 19 21 36 35 35 33 34 36 32 25 7 27 28 27 28 27 29 27 30 27 30 27 31 27 31 27 31 8 10 9 34 26 23 1 33 11 1…
65. FIXING BANK COMPONENTS FOR ETF(2) .................................................................................................................129
ETF 用固定バンク関係(2)
66. FIXING BANK COMPONENTS FOR ETF(3) .................................................................................................................131
ETF 用固定バンク関係(3)
67. FIXING BANK COMPONENTS FOR ETF(4) .................................................................................................................133
ETF 用固定バンク関係(4)
68. SYSTEM DIAGRAM (POWER UNIT) ............................................................................................................................135
SYSTEM DIAGRAM(POWER UNIT)
69. SYSTEM DIAGRAM (SERVO MOTOR) ........................................................................................................................137
SYSTEM DIAGRAM(SERVO MOTOR)
70. SYSTEM DIAGRAM (XY-RELAY)..................................................................................................................................139
SYSTEM DIAGRAM(XY − RELAY)
71. SYSTEM DIAGRAM (Z-THETA POWER)......................................................................................................................141
SYSTEM DIAGRAM(Zθ POWER)
72. SYSTEM DIAGRAM (Z-THETA MOTOR)......................................................................................................................143
SYSTEM DIAGRAM(Zθ MOTOR)
73. SYSTEM DIAGRAM (HEAD LF/LR)...............................................................................................................................145
SYSTEM DIAGRAM(HEAD LF / LR)
74. SYSTEM DIAGRAM (HEAD RF/RR) .............................................................................................................................147
SYSTEM DIAGRAM(HEAD RF / RR)
75. SYSTEM DIAGRAM (BASE-CARRY) ............................................................................................................................149
SYSTEM DIAGRAM(BASE − CARRY)
76. SYSTEM DIAGRAM (OPERATION/CPU/MONITOR)....................................................................................................151
SYSTEM DIAGRAM(OPERATION / CPU / MONITOR)
77. SYSTEM DIAGRAM (FRAME FAN).................................................................................................
..............................153
SYSTEM DIAGRAM(FRAME FAN)
78. SYSTEM DIAGRAM (FEEDER STATION) ....................................................................................................................155
SYSTEM DIAGRAM(FEEDER STATION)
79. SYSTEM DIAGRAM (MECH TOROLY I/F)....................................................................................................................157
SYSTEM DIAGRAM(MECH TOROLY I / F)
80. SYSTEM DIAGRAM (CVS/RFID/TRACEABILITY) ........................................................................................................159
SYSTEM DIAGRAM(CVS / RFID / TRACEABILITY)
81. SYSTEM DIAGRAM (ELEC TOROLY I/F) .....................................................................................................................161
SYSTEM DIAGRAM(ELEC TOROLYI / F)

- 1 -
MAIN UNIT
本体
1. BASE FRAME COMPONENTS(1)
ベースフレーム関係(1)
2
7
5
4
3
9
8
10
6
6
6
6
17
18
12
13
15
14
16
20
22
21
19
21
36
35
35
33
34
36
32
25
7
27
28 27 28
27
29
27
30 27 30
27
31
27
31
27
31
8
10
9
34
26
23
1
33
11
11
11
11
24
37

- 2 -
NOTE( 注記 ) #01....FOR ST ST 用
#02....FOR EN EN 用
REF.NO NOTE PART NO D E S C R I P T I O N
品 名
Qty
1 CM-2001000-01 PE MARK LABEL
PE マークシール
1
2 400-46706 Y FRAME_C
Y フレーム C
1
3 SM-6124502-TN BOLT M12 L=45
六角穴ボルト M 12 L =45
16
4 WS-1220002-KN SPRING WASHER
ばね座金
16
5 WP-1302501-SC WASHER 13X24X2.5
平座金 13 X 24 X 2.5
16
6 PS-0500142-KP SPRING PIN
スプリングピン
4
7 400-46707 Y FRAME S
Y フレーム S
2
8 SM-6124502-TN BOLT M12 L=45
六角穴ボルト M 12 L =45
16
9 WS-1220002-KN SPRING WASHER
ばね座金
16
10 WP-1302501-SC WASHER 13X24X2.5
平座金 13 X 24 X 2.5
16
11 PS-0500142-KP SPRING PIN
スプリングピン
4
12
#01
400-00519 BASEFRAME NUT
ベースフレームナット
6
13
#02
400-00535 BASEFRAME NUT(EN)
ベースフレームナット(EN)
6
14 SM-6124502-TN BOLT M12 L=45
六角穴ボルト M 12 L =45
18
15 WS-1220002-KN SPRING WASHER
ばね座金
18
16 WP-1302501-SC WASHER 13X24X2.5
平座金 13 X 24 X 2.5
18
17
#01
400-00403 ADJUST BOLT
アジャストボルト
6
18
#02
400-00404 ADJUST BOLT(EN)
アジャストボルト(EN)
6
19 E1044-729-000-A ADJUSTER NUT 36
アジャスタナット36
6
20 E1035-729-000 ADJUSTER FOOT
アジヤストフット
6
21 SM-6083002-TN SCREW M8 L=30
六角穴ボルト M 8 L =30
36
22 NM-6080002-SC NUT M8
六角穴ナット M 8 2種
18
23 SL-4040691-SC SCREW M4 L=6
座金付きなべ小ねじ M 4 L =6
104
24 E4595-855-000 VAC SPONGE
VAC スポンジ
24
25 100-04109 GROUND MARK
グランドマーク
4
26 400-47057 DUCT ASSY
ダクト組
1
27 SL-4040891-SC SCREW M4 L=8
座金付きなべ小ねじ M 4 L =8
(24)
28 400-00525 DUCT BRC
ダクト BRC
(2)
29 400-00523 DUCT BRL
ダクト BRL
(2)
30 400-00524 DUCT BRR
ダクト BRR
(2)
31 400-80016 DUCT 100-60-230A
ダクト100−60−230 A
(4)
32 400-47054 TRANSFORMAR_ASSY
トランス組
4
33 WP-1252210-SC WASHER 12.5X25.6X2.2
平座金 12.5 X 25.6 X 2.2
(4)
34 401-12792 TRANS_SCREW
トランスねじ
(4)
35 SM-6123002-TN SCREW M12 L=30
六角穴ボルト M 12 L =30
(4)
36 400-48062 TRANSFORMER
トランス
(2)
37 SM-3061052-TN SCREW M6 L=10
丸ねじ M 6 L =10
52