SP18 机械Parts List - 第81页
Ref No. Remark s R 1 Q'ty 8-C マスククリーニングユニット Mask Cleaning Unit ｲﾗｽﾄ No. Part No. 品 名 品番 数量 R 2 パーツリスト Kit N o . キット品 番 Kit Name キット名称 N610027799AA Part Name 備 考 ｾｸｼｮﾝNo. PARTS LIST Section No. R 3 PIPE 1 21 N2100419…
8-C
マスククリーニングユニット
Mask Cleaning Unit
パーツレイアウト
Ki
t
N
o
.
キット
品番
Kit Name
キット名称
N610027799AA
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
M63
Ref
No.
Remarks
R
1
Q'ty
8-C
マスククリーニングユニット
Mask Cleaning Unit
ｲﾗｽﾄ
No.
Part No.
品 名品番 数量
R
2
パーツリスト
Kit N
o
.
キット品
番
Kit Name
キット名称
N610027799AA
Part Name
備 考
ｾｸｼｮﾝNo.
PARTS LIST
Section No.
R
3
PIPE
1
21 N210041954AA
HOUSING
1
23 N210041956AA
PLATE
1
32 N210041964AD
BRACKET
1
34 N210025508AA
BRACKET
1
35 N210025509AA
BRACKET
1
36 N210054975AB
PW004A0
2
37 KXFB01CCA00
BRACKET
1
38 KXFB0056A00
TANK
1
48 N610027765AA
SOCKET
2
49 N610014951AA
FILTER
1
50 N610009394AA
BOLT
1
51 KXFB01AKA00
FILTER
1
52 KXFB01AMA01
COLLAR
1
53 KXFB01ALA01
Sensor
1
57 N610026818AA Sensor:-B1015
JOINT
3
77 N510028805AA PPL6-01
FILTER
1
83 N510011193AA VBLF-003
BAND
2
84 N510011271AA G-12
PUMP
1
85 N510048045AA PB1013-01-X31
JOINT
1
86 KXF0DYT5A00 KQ2H04-01S
PLATE
2
87 KXF05EMAA00 GP5-1
JOINT
1
88 N510028804AA PPC8-01
JOINT
1
89 N510028806AA PPV8
NIPPLE
2
91 N510019624AA (Ni)1
JOINT
2
92 N510019630AA (SL)1
HOSE
1
93 N510011280AA TAC Eco Duct D38
BAND
8
94 N510028769AA AS-50
C-RING
1
95 KXF04CVAA00 STW-16
COUPLER
1
96 N510015357AA MC10SF-304
COUPLER
1
97 N510015358AA MC10PM-304
BUSH
1
98 KXF0DX89A00 KG-032
BUSH
1
99 KXF0DX89A00 KG-032
BOLT
4
111 N510017316AA
Hexagon socket head cap screw M3X20-10.9 A2J (Trivalent)
BOLT
2
113 N510017381AA
Hexagon socket head cap screw M4X8-10.9 A2J (Trivalent)
BOLT
4
121 N510017390AA
Hexagon socket head cap screw M5X12-10.9 A2J (Trivalent)
BOLT
5
122 N510017395AA
Hexagon socket head cap screw M5X16-10.9 A2J (Trivalent)
BOLT
2
126 N510017472AA
Hexagon socket head cap screw M8X20-10.9 A2J (Trivalent)
WASHER
2
128 N510018497AA
Round finish plain washer 4 10H A2J (Trivalent)
WASHER
14
129 N510018499AA
Round finish plain washer 5 10H A2J (Trivalent)
WASHER
4
134 N510020098AA Thick washer for M3
WASHER
2
136 N510020102AA Thick washer for M8
TRIM
1
140 KXF0DULAA00 CE-024
TRIM
2
141 KXF0DUUAA00 CE-016
Valve
1
147 N610026816AC Valve:-F4021
BOLT
4
148 N510017372AA
Hexagon socket head cap screw M4X5-10.9 A2J (Trivalent)
BOLT
10
152 N510017419AA
Hexagon socket head cap screw M5X8-10.9 A2J (Trivalent)
BRACKET
1
157 N210054977AA
WASHER
5
171 N510020100AA Thick washer for M5
HOSE
1
172 N510011280AA TAC Eco Duct D38
Process Pump Kit
1
176 N610113238AA
M64
8-D
マスククリーニングユニット
Mask Cleaning Unit
パーツレイアウト
Ki
t
N
o
.
キット
品番
Kit Name
キット名称
N610027799AA
ｾｸｼｮﾝNo.
PARTS LAYOUT
Section No.
M65