Maintenance Manual - 第105页

RL131 MAINTENANCE MANUAL 5. SENSOR LA YOUT DA8MEC-Y0-00 0-A0 5-2 DA8MEC-Y0-000-A0 5. SENSOR LAYOUT This chapter desc ribes sen sor layout.

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RL131
MAINTENANCE MANUAL
5. SENSOR LAYOUT
DA8MEC-Y0-000-A0
5-1
5. SENSOR LAYOUT
RL131
MAINTENANCE MANUAL
5. SENSOR LAYOUT
DA8MEC-Y0-000-A0
5-2
DA8MEC-Y0-000-A0
5. SENSOR LAYOUT
This chapter describes sensor layout.
RL131
MAINTENANCE MANUAL
5.1 Insertion Head
DA8MEC-Y1-M00-A0
5.1-1
5.1. Insertion Head
DA8MEC-Y1-M00-A0
5.1.1 Insertion Head (qH Axis)
Unit No. N610067465AA
No.
Name Type
1.
qH axis origin detection
EE-SX672A
2.
qH axis (+) safety limit
EE-SX672A
3.
qH axis (-) safety limit
EE-SX672A
3.
2.
1.