Maintenance Manual - 第114页
RL131 MAINTENANCE MANUAL 5.5 Lower Pos itioning Unit DA8MEC-Y4-00 0-A0 5.5-1 5.5. Low er Positioning Unit DA8MEC-Y4-000-A0 5.5.1 X-Y Table (X Axis Dri ve) Unit No. N610055746AA No. Name Type 1. X axis (+) (-) s afety lim…
RL131
MAINTENANCE MANUAL
5.4 PCB Positioning Unit
DA8MEC-Y3-400-A0
5.4-2
RL131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5-1
5.5. Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5.1 X-Y Table (X Axis Drive)
Unit No. N610055746AA
No.
Name Type
1.
X axis (+) (-) safety limit detection LS-11S / RL
2.
X axis (-) over limit detection P921SA1
3.
X axis origin detection P921S1
4.
X axis (+) over limit detection P921SA1
1.
3.
4.
2.
RL131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5-2
5.5.2 X-Y Table (Y Axis Drive)
Unit No. N610055746AA
No.
Name Type
1.
Y axis (+) (-) safety limit detection LS-11S / RL
2.
Y axis (-) over limit detection P921SA1
3.
Y axis origin detection P921S1
4.
Y axis (+) over limit detection P921SA1
1.
3.
2.
4.