Maintenance Manual - 第115页

RL131 MAINTENANCE MANUAL 5.5 Lower Posit ioning Unit DA8MEC-Y4-00 0-A0 5.5-2 5.5.2 X-Y Table (Y Axis Dri ve) Unit No. N610055746AA No. Name Type 1. Y axis (+) (-) safety limit detec tion LS-11S / RL 2. Y axis (-) over li…

100%1 / 250
RL131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5-1
5.5. Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5.1 X-Y Table (X Axis Drive)
Unit No. N610055746AA
No.
Name Type
1.
X axis (+) (-) safety limit detection LS-11S / RL
2.
X axis (-) over limit detection P921SA1
3.
X axis origin detection P921S1
4.
X axis (+) over limit detection P921SA1
1.
3.
4.
2.
RL131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5-2
5.5.2 X-Y Table (Y Axis Drive)
Unit No. N610055746AA
No.
Name Type
1.
Y axis (+) (-) safety limit detection LS-11S / RL
2.
Y axis (-) over limit detection P921SA1
3.
Y axis origin detection P921S1
4.
Y axis (+) over limit detection P921SA1
1.
3.
2.
4.
RL131
MAINTENANCE MANUAL
5.5 Lower Positioning Unit
DA8MEC-Y4-000-A0
5.5-3
Schematic Diagram of Sensor Positions
Y axis (-)
Power OFF
Inversion
Inver
sion
Power OFF
X axis (+)
X axis (-)
Y axis (+)
Power OFF
Inversion
Inversion
Power OFF
328
±
0.1
8.7±0.1
9.7±0.1