4OM-1050-002 - 第164页
Error ID Item Description 050581 T a b l e -X A x i s S er v o A l a rm Encoder backup error . [Shutdown touch sw key and mainbreaker sw off.] 050582 T a b l e -X A x i s S er v o A l a rm Encoder checksum error . [Shutd…

Error ID Item Description
050401 Table-X Axis Limit (+) Limit error has been detected.
050402 Table-X Axis Limit (-) Limit error has been detected.
(Cause 1) An optical beam of the sensor is shielded.
(Cause 2) Dirt adheres to the sensor and the optical beam is shielded.
(Remedy 1) Turn off the power supply and move the X/Y table to the position where operations
can be performed more easily.
Re-attach the light shield plate and the sensor securely (remove the looseness).
Re-supply power to the machine and perform the zeroing operation.
(Remedy 2) Wipe off dirt on the sensor and re-perform the zeroing operation.
050502 Table-X Axis Servo Alarm User constant breakdown. [Shutdown touch sw key and
mainbreaker sw off.]
050503 Table-X Axis Servo Alarm Main circuit encoder error
050504 Table-X Axis Servo Alarm User constant setting error. [Shutdown touch sw key and
mainbreaker sw off.]
050505 Table-X Axis Servo Alarm Combination error
050510 Table-X Axis Servo Alarm Overcurrent or Heat Sink Overheated. [Shutdown touch sw
key and mainbreaker sw off.]
050530 Table-X Axis Servo Alarm Regeneration error detected
050532 Table-X Axis Servo Alarm Regenerative overload
050540 Table-X Axis Servo Alarm Overvoltage
050541 Table-X Axis Servo Alarm Undervoltage
050551 Table-X Axis Servo Alarm Overspeed
050571 Table-X Axis Servo Alarm Overload: high load
050572 Table-X Axis Servo Alarm Overload: low load
050573 Table-X Axis Servo Alarm Dynamic break overload
050574 Table-X Axis Servo Alarm Overload of Surge Current Limit Resistor
05057a Table-X Axis Servo Alarm Heat sink overheated
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0110-003 2-4 7 AFO01ETRP
3.3 Error IDs and Remedial Procedures

Error ID Item Description
050581 Table-X Axis Servo Alarm Encoder backup error. [Shutdown touch sw key and
mainbreaker sw off.]
050582 Table-X Axis Servo Alarm Encoder checksum error. [Shutdown touch sw key and
mainbreaker sw off.]
050583 Table-X Axis Servo Alarm Absolute encoder battery error
050584 Table-X Axis Servo Alarm Encoder data error. [Shutdown touch sw key and mainbreaker
sw off.]
050585 Table-X Axis Servo Alarm Encoder overspeed
050586 Table-X Axis Servo Alarm Encoder overheated
0505b1 Table-X Axis Servo Alarm Reference speed input read error
0505b2 Table-X Axis Servo Alarm Reference torque input read error
0505b6 Table-X Axis Servo Alarm Gatearay error
0505bf Table-X Axis Servo Alarm System alarm. [Shutdown touch sw key and mainbreaker sw
off.]
0505c1 Table-X Axis Servo Alarm Servo overrun detected
0505c6 Table-X Axis Servo Alarm Closed loop a/b
0505c7 Table-X Axis Servo Alarm Closed loop c
0505c8 Table-X Axis Servo Alarm Encoder clear error (multi turn limit). [Shutdown touch sw key
and mainbreaker sw off.]
0505c9 Table-X Axis Servo Alarm Encoder communications error. [Shutdown touch sw key and
mainbreaker sw off.]
0505ca Table-X Axis Servo Alarm Encoder parameter error. [Shutdown touch sw key and
mainbreaker sw off.]
0505cb Table-X Axis Servo Alarm Encoder echoback error. [Shutdown touch sw key and
mainbreaker sw off.]
0505cc Table-X Axis Servo Alarm Multiturn limit disagreement
0505d0 Table-X Axis Servo Alarm Position error pulse overflow
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0110-003 2-4 8 AFO01ETRP
3.3 Error IDs and Remedial Procedures

Error ID Item Description
0505e0 Table-X Axis Servo Alarm No option
0505e1 Table-X Axis Servo Alarm Option time out
0505e2 Table-X Axis Servo Alarm Option WDC error
0505e5 Table-X Axis Servo Alarm WDT error
0505e6 Table-X Axis Servo Alarm Communication error
0505ea Table-X Axis Servo Alarm Servo pack error
0505eb Table-X Axis Servo Alarm Servo pack access error
0505ec Table-X Axis Servo Alarm Servo pack WDC error
0505ed Table-X Axis Servo Alarm Command not execute
0505f1 Table-X Axis Servo Alarm Power line open phase
050591 Table-X Axis Servo Alarm Overload warning
050592 Table-X Axis Servo Alarm Regenerative overload warning
050594 Table-X Axis Servo Alarm Data setting warning
050595 Table-X Axis Servo Alarm Command warning
050596 Table-X Axis Servo Alarm Communication warning
(Cause 1) Self-Diagnostics Error Message
(Remedy 1) Zero all axes and re-start the operation.
When the machine cannot be set to its normal condition, consult our service
personnel for the remedy.
0110-003 2-4 9 AFO01ETRP
3.3 Error IDs and Remedial Procedures