4OM-1050-002 - 第31页

Fig. 4A17 1.3 Maintenance Spots 0207-004 1-18 AFO01ETRP

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(7) X/Y Table Section
1.3 Maintenance Spots
0207-004 1-17 AFO01ETRP
Fig. 4A16
Fig. 4A17
1.3 Maintenance Spots
0207-004 1-18 AFO01ETRP
(8) Light Source Device for Component Recognition
1.3 Maintenance Spots
0207-004 1-19 AFO01ETRP
Fig. 4A18
Fig. 4A19