N7201A430C - 第9页
NPM-D 上一级通信 EJM1DC-CT-01F-00 Page 9 4.3 作业顺序 ............................................................................................................. 4-44 4.3.1 准备 ...................................................…
NPM-D
上一级通信
Page 8 EJM1DC-CT-01F-00
3.
事件
................................................................. 3-1
3.1
命令一览表
...........................................................................................................3-2
3.2
格式
......................................................................................................................3-3
3.2.1
机器事件通知
..................................................................................................................................... 3-3
3.2.2 LNB
事件通知
..................................................................................................................................... 3-7
3.2.3
事件过滤器设定
................................................................................................................................3-10
3.3
事件一览表
.........................................................................................................3-12
3.3.1
机器事件一览表
................................................................................................................................3-12
3.3.2
机器事件详细对应表
........................................................................................................................ 3-13
3.3.3 LNB
事件一览表
................................................................................................................................3-15
3.4
事件详细格式
.....................................................................................................3-23
3.4.1
发生场所
........................................................................................................................................... 3-23
3.4.2
轨道区分
........................................................................................................................................... 3-24
3.4.3
轴错误原因编号
................................................................................................................................3-25
3.4.4
工件用完发生
/
解除代码
.................................................................................................................... 3-26
3.4.5
发生
/
解除代码
.................................................................................................................................. 3-26
3.4.6
配线通信错误详细代码
..................................................................................................................... 3-26
3.4.7
搬运错误发生场所编号
..................................................................................................................... 3-27
3.4.8
搬运错误原因编号
............................................................................................................................ 3-27
3.4.9
真空传感器错误原因代码
................................................................................................................. 3-27
3.4.10
现在、前一基板位置编号
............................................................................................................... 3-27
3.4.11
编带接头检测事件的检测代码
........................................................................................................ 3-28
4.
元件核对作业
.................................................. 4-1
4.1
命令一览表
...........................................................................................................4-2
4.2
格式
......................................................................................................................4-4
4.2.1
元件核对要求
..................................................................................................................................... 4-4
4.2.2
元件核对应答
..................................................................................................................................... 4-8
4.2.3
生产数据配置信息要求
..................................................................................................................... 4-12
4.2.4
生产数据配置信息通知
..................................................................................................................... 4-14
4.2.5
准备完毕通知
................................................................................................................................... 4-19
4.2.6
元件关联事件通知
............................................................................................................................ 4-20
4.2.7
元件核对取消
................................................................................................................................... 4-24
4.2.8
定期检查模式转移
............................................................................................................................ 4-26
4.2.9
定期检查模式转移应答
..................................................................................................................... 4-28
4.2.10
生产开始许可
................................................................................................................................. 4-32
4.2.11
机器联锁
......................................................................................................................................... 4-33
4.2.12
机器联锁应答
................................................................................................................................. 4-35
4.2.13
机器联锁解除
................................................................................................................................. 4-37
4.2.14
机器联锁解除应答
.......................................................................................................................... 4-39
4.2.15
处理结果一览表
.............................................................................................................................. 4-41
NPM-D
上一级通信
EJM1DC-CT-01F-00
Page 9
4.3
作业顺序
.............................................................................................................4-44
4.3.1
准备
...................................................................................................................................................4-44
4.3.2
元件供给
...........................................................................................................................................4-51
4.3.3
定期检查
...........................................................................................................................................4-55
4.3.4
重新检查
...........................................................................................................................................4-63
5.
元件管理信息
................................................... 5-1
5.1
命令一览表
...........................................................................................................5-2
5.2
格式
......................................................................................................................5-3
5.2.1
最新卷带消耗信息通知
........................................................................................................................5-3
5.2.2
更换卷带消耗信息通知
........................................................................................................................5-7
5.2.3
供料器配置信息通知
.........................................................................................................................5-11
5.2.4
供料器使用信息通知
.........................................................................................................................5-13
5.2.5
供料器种类代码一览表
......................................................................................................................5-14
6.
设定
................................................................. 6-1
6.1
机器设定
...............................................................................................................6-2
6.1.1
机器选项设定
......................................................................................................................................6-2
6.2 LNB
的设定
...........................................................................................................6-7
6.2.1
类型
1 (
事件
)
设定
..............................................................................................................................6-7
6.2.2
类型
2 (
其他公司元件对照
)
设定
......................................................................................................6-10
6.2.3
类型
3 (
元件管理信息
)
设定
.............................................................................................................6-11
7.
附录
................................................................. 7-1
7.1
用语一览表
...........................................................................................................7-2
7.2
选项许可
...............................................................................................................7-3
7.2.1
确认选项许可的登录状态
....................................................................................................................7-3
7.2.2
选项许可的登录方法
...........................................................................................................................7-4
7.2.3
选项许可的删除方法
...........................................................................................................................7-6
NPM-D
上一级通信
Page 10 EJM1DC-CT-01F-00
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