Utah-94-721002-System-Manual.pdf
Issue 1: March 2006 póëíÉã=j~åì~ä= mä~ëã~ä~Ä póëíÉãNMM = Modular Cluster System Works Order No.: 94-721002 Customer: University of Utah Typical mä~ëã~ä~Ä póëíÉãNMM (ICP 180) WARNING THIS SYSTEM INCORPOR ATES POTENTIALLY …
Issue 1: March 2006
póëíÉã=j~åì~ä=
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Modular Cluster System
Works Order No.: 94-721002
Customer: University of Utah
Typical mä~ëã~ä~ÄpóëíÉãNMM (ICP 180)
WARNING
THIS SYSTEM INCORPORATES POTENTIALLY DANGEROUS COMPONENTS, WHICH CAN
EXPOSE PERSONNEL TO HAZARDS RESULTING IN DEATH OR SERIOUS INJURY.
BEFORE ATTEMPTING TO INSTALL, POWER UP OR OPERATE THIS SYSTEM, ENSURE YOU
HAVE READ AND UNDERSTOOD THE ENCLOSED SYSTEM MANUAL,
ESPECIALLY SECTION 1
(HEALTH AND SAFETY).
Issue 1: March 2006
póëíÉã=j~åì~ä=
mä~ëã~ä~ÄpóëíÉãNMM=
Modular Cluster System
Works Order No.: 94-721002
Customer: University of Utah
Volume 1: Operation and Maintenance Manual
This manual, Volume 1, is one of a series for the machine as follows:
Volume 1 Operation and Maintenance Manual
Volume 2 System Drawings
Volume 3 OEM Manuals
Notes:
1. Please regard this manual as part of the system.
2. Ensure that any amendment received is incorporated in the text.
Oxford Instruments Plasma Technology
Yatton, Bristol, BS49 4AP
Tel: +44 1934 837000
Fax: +44 1934 837001
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Title and inside front cover pages
Contents List................................................................................................................................... (iii)
Preface.............................................................................................................................................(iv)
Customer Support Facilities............................................................................................................(iv)
Quality Control Forms .....................................................................................................................(v)
Goods Return Form QCF60
Certificate of Pre-Acceptance and Certificate of Acceptance QCF 61
System Readyness Form QCF 89
1. Health and Safety.......................................................................................................1-1
2. Services (ICP 180)........................................................................................................2-1
3. Description..................................................................................................................3-1
4. Installation..................................................................................................................4-1
5. Operating Instructions...............................................................................................5-1
6. Maintenance ...............................................................................................................6-1
7. Process Guide and Glossary.......................................................................................8-1
8. Uninstallation and disposal.......................................................................................9-1
Appendix A Measurement of radio frequency and microwave emissions
Appendix B Operation and maintenance of turbomolecular pumps
Appendix C Concessions
Appendix E PC hard drive restore information
Appendix IDS Installation Data Sheets (ICP 180)
Appendix R Rotameter data
Appendix S Services Specifications for Plasmalab and Ionfab Systems
ICP 180 Inductively Coupled Plasma Source Equipment Manual
OIPT Automatch Unit Equipment Manual
Plasmalab System 100 Illustrated Parts Catalogue (ICP 180)
System Restore DVD (in HDD Restore Kit) and System Software CD
Contents
Printed: 28 March 2006 09:54 Page (iii) Issue 1: March 2006