Utah-94-721002-System-Manual.pdf - 第103页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM 2) Click on the process chamber wafer indicator. The wafer is tra nsferred to the process chamber. To transfer a wafer from a process chamber to t…

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Fig 5.13: Robot control page

The Robot Control page is used to manually transfer a wafer between chambers (when

operating in automatic mode, i.e. running a recipe, wafers are transferred automatically). The

location of the wafer is indicated by a green wafer indicator. The arrowed path shows the

currently available wafer destination.

The page provides the following features:

Show Pumps

button

Displays the Pump Control page

Transfer arm

and Wafer lift

status panel

Displays indicators for ARM HOME, ARM EXTENDED and ARM FAULT

(illuminated when active). Also displays WAFER LIFT and WAFER CLAMP

status (up or down).

Transfer

status

message field

Displays context-related message about the wafer transfer progress.

Process

chamber and

Automatic load

lock mimic

Displays the wafer location and possible wafer destination.

To transfer a wafer from the Automatic load lock to the process chamber to carry out a

manual process, use the following steps:

1) Click on the Automatic load lock wafer mimic. The blue arrowed path is displayed

showing the available destination.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-36 of 52 Printed: 22-Mar-06, 10:42

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2) Click on the process chamber wafer indicator. The wafer is transferred to the process

chamber.

To transfer a wafer from a process chamber to the Automatic load lock on completion of a

manual process, use the following steps:

1) Click on the process chamber’s green wafer indicator. The blue arrowed path is

displayed showing the available destination.

2) On the Automatic load lock mimic, click on the wafer indicator. The wafer is

transferred to the Automatic load lock.

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Fig 5.14: Recipe page

The recipe page is used to create, edit and run recipes. See sub-section 5.4.5 (Automatic

process run, page 5-16) and sub-section 5.5 (Creating and editing recipes, page 5-21).

The facilities on this page are:

Automatic

button

Select to carry out an automatic process run using a recipe. The button’s

indicator is coloured yellow when selected.

The recipe will be performed on a substrate. The substrate will start at

the normal wafer entry point and will be automatically transferred to

each chamber, as the recipe requires. At the end of processing, the

wafer will be returned to its starting point.

Operating Instructions

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Manual

button

Select to carry out a manual process run. The button’s indicator is

coloured yellow when selected.

The recipe is associated with a chamber. If selected, further options

‘wafer’ and ‘no wafer’ are given. No automatic wafer transfers are

performed; therefore a wafer must be loaded using the Robot Control

page if required.

Recipe Name

field

The name of the currently loaded recipe.

Data Log

Interval field

Displays the data log interval, i.e. the time interval between the logging

of system parameters.

Created field

The date and time of recipe creation.

Recipe

length field

The length of time taken to run the recipe. This is the sum of all the

process times, excluding wafer transfer time, process stabilisation and

pumping times.

Recipe step list

A scrollable sequential list of steps contained in the recipe.

New button

Select to create a new recipe.

Load button

Select to load an existing recipe.

Save button

Select to save the current recipe.

Run button Select to run the current recipe. Be aware that selecting this button

will cause the robotic arm, slit valve, etc to operate!

Step Library Panel

Edit button

Select to edit the selected (highlighted) recipe step.

New button

Select to create a new recipe step.

Copy button

Select to copy the selected recipe (you are prompted for a new step

name).

Delete button

Select to delete the selected (highlighted) recipe.

Step Library

list

Displays the recipe steps available in a scrollable list.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-38 of 52 Printed: 22-Mar-06, 10:42