Utah-94-721002-System-Manual.pdf - 第104页

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2) Click on the process chamber wafer indicator. The wafer is transferred to the process

chamber.

To transfer a wafer from a process chamber to the Automatic load lock on completion of a

manual process, use the following steps:

1) Click on the process chamber’s green wafer indicator. The blue arrowed path is

displayed showing the available destination.

2) On the Automatic load lock mimic, click on the wafer indicator. The wafer is

transferred to the Automatic load lock.

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Fig 5.14: Recipe page

The recipe page is used to create, edit and run recipes. See sub-section 5.4.5 (Automatic

process run, page 5-16) and sub-section 5.5 (Creating and editing recipes, page 5-21).

The facilities on this page are:

Automatic

button

Select to carry out an automatic process run using a recipe. The button’s

indicator is coloured yellow when selected.

The recipe will be performed on a substrate. The substrate will start at

the normal wafer entry point and will be automatically transferred to

each chamber, as the recipe requires. At the end of processing, the

wafer will be returned to its starting point.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-37 of 52 UC Davis 94-721001 Issue 1: March 06

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Manual

button

Select to carry out a manual process run. The button’s indicator is

coloured yellow when selected.

The recipe is associated with a chamber. If selected, further options

‘wafer’ and ‘no wafer’ are given. No automatic wafer transfers are

performed; therefore a wafer must be loaded using the Robot Control

page if required.

Recipe Name

field

The name of the currently loaded recipe.

Data Log

Interval field

Displays the data log interval, i.e. the time interval between the logging

of system parameters.

Created field

The date and time of recipe creation.

Recipe

length field

The length of time taken to run the recipe. This is the sum of all the

process times, excluding wafer transfer time, process stabilisation and

pumping times.

Recipe step list

A scrollable sequential list of steps contained in the recipe.

New button

Select to create a new recipe.

Load button

Select to load an existing recipe.

Save button

Select to save the current recipe.

Run button Select to run the current recipe. Be aware that selecting this button

will cause the robotic arm, slit valve, etc to operate!

Step Library Panel

Edit button

Select to edit the selected (highlighted) recipe step.

New button

Select to create a new recipe step.

Copy button

Select to copy the selected recipe (you are prompted for a new step

name).

Delete button

Select to delete the selected (highlighted) recipe.

Step Library

list

Displays the recipe steps available in a scrollable list.

Operating Instructions

UC Davis 94-721001 Issue 1: March 06 Page 5-38 of 52 Printed: 22-Mar-06, 10:42

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The production mode page is automatically displayed when a user logs on in production

mode. To use the production mode facility, refer to sub-section 5.4.7 (page 5-18).

Note that the System menu button can be used to select the pumping option. This provides

the facility of evacuating and venting the automatic load lock.

Fig 5.15: Production mode page

The facilities available on this page are:

Recipe Name

field

The name of the currently loaded recipe. The indicator at the right of

this field is coloured red until a recipe is loaded when it changes to

green.

Batch Id field

Enter the batch identity of the currently loaded wafer. The indicator

at the right of this field is coloured red until a batch identity is

entered when it changes to green.

Created field

The date and time of recipe creation.

Recipe Length

field

The length of time taken to run the recipe.

Load button

Select to load an existing recipe.

Run button

Select to run the current recipe. Be aware that selecting this

button will cause system components, e.g. valves, heaters,

etc., to operate! Note that this button only becomes active when a

recipe has been loaded and a batch identity has been entered.

Operating Instructions

Printed: 22-Mar-06, 10:42 Page 5-39 of 52 UC Davis 94-721001 Issue 1: March 06