Utah-94-721002-System-Manual.pdf - 第118页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ =fåëíêìã Éåíë= mä~ëã~ =qÉÅÜåçäçÖó == System Manual Hide events after selection button Displays all events before and including the highlighted event. Show all events button: Displays all previo…

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
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Fig 5.21: System log page
The system log page allows logged system events to be viewed. A filter facility allows the
viewed events to be displayed by event type and time of occurrence.
The page provides the following features:
Event list: A scrollable list of events in date/time order. Each event is categorised
by an icon, and an event description is given. Use the scrollbar and
associated buttons to move the list up or down by a single event, a
page of events or to the end of the list.
Delete button
Removes the selected event(s) from the Event list.
Undo button
Only active after a Delete action. Restores the last deleted event.
Filter by
Event Type
panel:
A list of event types with associated checkboxes. Use this panel to select
the events to display in the Event list. A checkbox showing an ‘x’
indicates that the associated event type will not be displayed. A
checkbox showing a ‘9’ indicates that the associated event type will be
displayed.
Filter by time
controls:
Use these controls to select events occurring in a time range to be
displayed.
Hide events
before
selection
button
Displays all events after and including the highlighted event.
Operating Instructions
Printed: 22-Mar-06, 10:42 Page 5-51 of 52 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Hide events
after
selection
button
Displays all events before and including the highlighted event.
Show all
events
button:
Displays all previously hidden events.
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While PC 2000 is running, two log files are maintained, one for the system log and the other
for the data log. These files are stored on your hard disk in the folder C:\Optsyslg. Details of
the log files are as follows.
System log file – The filename for this file is of the form s0Caabb where aa represents the
month, e.g. 06 (for June) and bb represents the day of the month, e.g. 11 (for the eleventh
day).
Data log file – The filename for this file is of the form p1caabb where aa represents the
month, e.g. 06 (for June) and bb represents the day of the month, e.g. 11 (for the eleventh
day).
When PC 2000 is shut down correctly (select the System menu, then the Exit option), both log
files are automatically saved and closed. If PC 2000 is then started again, the files are
automatically opened and their data is available via the System Log page and the Select Log
Data page.
If PC 2000 is not shut down correctly, e.g. the PC is switched off or the PC ‘hangs’ etc., one or
both of the log files can become corrupted. If this happens, the next time PC 2000 is started
the corrupt log file(s) will be detected and reported on-screen by an error dialogue. To
correct this problem, use the following procedure:
1) Close PC 2000.
2) Use Windows Explorer to navigate to C:\Optsyslg.
3) Delete the reported log file.
4) Re-start PC 2000.
Operating Instructions
UC Davis 94-721001 Issue 1: March 06 Page 5-52 of 52 Printed: 22-Mar-06, 10:42
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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6.
Maintenance ............................................................................................................6-1
6.1 Customer support facilities.............................................................................................6-3
6.2 General.............................................................................................................................6-4
6.3 Safety maintenance ........................................................................................................6-5
6.3.1 Inspection and renewal...........................................................................................6-5
6.3.1.1 Quartz components.........................................................................................6-5
6.3.1.2 Alumina components.......................................................................................6-5
6.4 94-100-BW-2F Base wired 2-frame kit ...........................................................................6-6
6.4.1 Weekly......................................................................................................................6-6
6.4.2 Monthly....................................................................................................................6-6
6.4.3 Three-Monthly.........................................................................................................6-7
6.4.4 Annually...................................................................................................................6-7
6.4.5 Changing the gas bottles........................................................................................6-7
6.4.6 Etch cleaning............................................................................................................6-7
6.5 94-100-3-41C ICP 180 chamber kit with gate valve ......................................................6-9
6.5.1 Monthly....................................................................................................................6-9
6.5.2 O-rings......................................................................................................................6-9
6.6 Top electrode.................................................................................................................6-10
6.6.1 Monthly..................................................................................................................6-10
6.6.2 Six-monthly (tools with a removable showerhead)............................................6-10
6.6.3 Annually (tools having access to the gas inlet isolation assembly from the top
side only)................................................................................................................6-10
6.7 94-100-5-12A Cryo He lower electrode........................................................................6-11
6.7.1 Monthly..................................................................................................................6-11
6.8 94-100-6-500/200V RIE 500W RF generator / OIPT AMU kit.......................................6-12
6.8.1 Three-monthly .......................................................................................................6-12
6.9 Vacuum system..............................................................................................................6-13
6.9.1 Active Pirani gauge ...............................................................................................6-13
6.9.2 Capacitance manometer.......................................................................................6-13
6.9.2.1 Six-monthly (or as necessary)........................................................................6-13
6.9.3 Penning gauge.......................................................................................................6-13
6.9.3.1 Dismantling the body tube ...........................................................................6-14
6.9.3.2 Cleaning..........................................................................................................6-15
6.9.4 Turbomolecular pumps.........................................................................................6-15
6.9.4.1 Daily................................................................................................................6-15
6.9.4.2 Re-greasing of turbo pumps fitted to process chambers............................6-15
6.9.4.3 2000 to 8000 hours (3 to 12 months): pump relubrication.........................6-15
6.9.4.4 Alcatel turbo pumps fitted with bake-out collars.......................................6-16
6.9.5 Rotary vane pumps................................................................................................6-16
6.10 Gas handling system......................................................................................................6-17
6.10.1 Wall-mounted gas pod..........................................................................................6-17
6.10.1.1 Annually .........................................................................................................6-17
6.10.2 Mass flow controllers ............................................................................................6-17
6.10.2.1 Annually (or as necessary).............................................................................6-17
6.10.3 Filters......................................................................................................................6-17
6.10.3.1 Annually (or as necessary).............................................................................6-17
6.11 Pump lubricants.............................................................................................................6-18
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-1 of 22 UC Davis 94-721001 Issue 1: March 06