Utah-94-721002-System-Manual.pdf - 第12页
QCF 89 Issue 6 Page 4 of 4 Please return the completed form to your nearest Oxford Instruments Support Office, detailed below: USA & Canada DE, NE, B, SE, FI,DK Eastern Territories U.K. and all Other Territories Oxfo…
QCF 89 Issue 6
Page 3 of 4
Please tick appropriate box YES NO Detail
15. Have the rotary pump exhaust lines been connected to
an exhaust extraction system that meets all local safety
standards?
16. If the system is fitted with a cryo pump, which is used
for toxic gasses, has an action plan been discussed and
implemented for connection of the pump outlet
connector?
17. Has the rotary pump purge been connected to the
pumps and nitrogen supply?
18. Have the rotary pumps been filled with oil of the
correct type for the pump in use?
20. Is the gas pod extraction connected with a minimum
flow rate of 1m3/hour (6 line gas pod) or 3 m3/hour (12
line gas pod). Does the extraction system meet all local
safety regulations?
21. Do you believe that that demonstration of process
has been included in the purchase of your tool?
21.a. Please state, which processes require to be
demonstrated.
21.b. Are the required samples and measurement
equipment available for the process work to follow on
from hardware acceptance?
Name :
Position Within Company:
Signature:
Date: / /0
Preferred Date for Commissioning
Commencement:
/ /0
QCF 89 Issue 6
Page 4 of 4
Please return the completed form to
your nearest Oxford Instruments
Support Office, detailed below:
USA & Canada DE, NE, B, SE, FI,DK Eastern Territories U.K. and all Other Territories
Oxford Instruments America Inc Oxford Instruments GmbH Oxford Instruments Pte. Ltd Oxford Instruments Plasma
Technology
Plasma Technology Support Manager Plasma Technology Raymond Wong Global Support Manager
130A Baker Avenue Extension Postfach 4509 371 Beach Road North End
Concord 65035 Wiesbaden #02-07 Keypoint Yatton, Nr Bristol
MA 01742 Germany Singapore 199597 BS49 4AP. U.K.
Tel: (800) 447 4717 Tel: +49 6122 937161 Tel: +65 6337 6848 Tel: +44 1934 837070
Fax: (978) 369 8287 Fax: +49 6122 937175 Fax: +65 6337 6286 Fax: +44 1934 837071
Email:
CSG@ma.oxinst.com Email: Plasma@oxford.de Email: Raymond.Wong@oxford-instruments.com.sg Email: Support.PT@oxinst.co.uk
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A l’attention des clients de langue française
Le document hygiène et securité est disponible en fraçais. Vous devez
vous assurer que cette version est présente dans ce manual. Si elle est
manquante contactez votre representant Oxford Instruments Plasma
Technology.
Für deutschsprachige Kunden
besteht dieses Kapitel “Health and Safety” unter dem Titel “Sicherheit
und Unfallverhütung” auch in deutscher Fassung, die in diesem
Handbuch enthalten sein sollte. Falls diese fehlt, fordern Sie bitte ein
Exemplar bei Oxford Instruments Plasma Technology an.
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1 Health and Safety.........................................................................................................................1-1
1.1 Introduction............................................................................................................................................1-2
1.1.1 Warnings and Cautions................................................................................................................1-2
1.2 Hazard Categories..................................................................................................................................1-3
1.3 Specific Hazards......................................................................................................................................1-4
1.3.1 Electrical........................................................................................................................................1-4
1.3.2 Electromagnetic Radiation..........................................................................................................1-5
1.3.3 Light..............................................................................................................................................1-6
1.3.4 High Temperature........................................................................................................................1-7
1.3.5 Low Temperature.........................................................................................................................1-7
1.3.6 Gases .............................................................................................................................................1-8
1.3.7 Materials.....................................................................................................................................1-10
1.3.8 Process Chemicals.......................................................................................................................1-12
1.3.9 Vacuum.......................................................................................................................................1-12
1.3.10 Compressed air...........................................................................................................................1-13
1.3.11 Mechanical..................................................................................................................................1-13
1.3.12 General........................................................................................................................................1-14
1.4 Warning and advisory labels ...............................................................................................................1-16
Health and Safety
Printed:29 May 2005, 06:31 Page 1-1 of 18 Issue 11: August 2004