Utah-94-721002-System-Manual.pdf - 第120页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . 6.11.1 General ..........................................…

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System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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6.
Maintenance ............................................................................................................6-1
6.1 Customer support facilities.............................................................................................6-3
6.2 General.............................................................................................................................6-4
6.3 Safety maintenance ........................................................................................................6-5
6.3.1 Inspection and renewal...........................................................................................6-5
6.3.1.1 Quartz components.........................................................................................6-5
6.3.1.2 Alumina components.......................................................................................6-5
6.4 94-100-BW-2F Base wired 2-frame kit ...........................................................................6-6
6.4.1 Weekly......................................................................................................................6-6
6.4.2 Monthly....................................................................................................................6-6
6.4.3 Three-Monthly.........................................................................................................6-7
6.4.4 Annually...................................................................................................................6-7
6.4.5 Changing the gas bottles........................................................................................6-7
6.4.6 Etch cleaning............................................................................................................6-7
6.5 94-100-3-41C ICP 180 chamber kit with gate valve ......................................................6-9
6.5.1 Monthly....................................................................................................................6-9
6.5.2 O-rings......................................................................................................................6-9
6.6 Top electrode.................................................................................................................6-10
6.6.1 Monthly..................................................................................................................6-10
6.6.2 Six-monthly (tools with a removable showerhead)............................................6-10
6.6.3 Annually (tools having access to the gas inlet isolation assembly from the top
side only)................................................................................................................6-10
6.7 94-100-5-12A Cryo He lower electrode........................................................................6-11
6.7.1 Monthly..................................................................................................................6-11
6.8 94-100-6-500/200V RIE 500W RF generator / OIPT AMU kit.......................................6-12
6.8.1 Three-monthly .......................................................................................................6-12
6.9 Vacuum system..............................................................................................................6-13
6.9.1 Active Pirani gauge ...............................................................................................6-13
6.9.2 Capacitance manometer.......................................................................................6-13
6.9.2.1 Six-monthly (or as necessary)........................................................................6-13
6.9.3 Penning gauge.......................................................................................................6-13
6.9.3.1 Dismantling the body tube ...........................................................................6-14
6.9.3.2 Cleaning..........................................................................................................6-15
6.9.4 Turbomolecular pumps.........................................................................................6-15
6.9.4.1 Daily................................................................................................................6-15
6.9.4.2 Re-greasing of turbo pumps fitted to process chambers............................6-15
6.9.4.3 2000 to 8000 hours (3 to 12 months): pump relubrication.........................6-15
6.9.4.4 Alcatel turbo pumps fitted with bake-out collars.......................................6-16
6.9.5 Rotary vane pumps................................................................................................6-16
6.10 Gas handling system......................................................................................................6-17
6.10.1 Wall-mounted gas pod..........................................................................................6-17
6.10.1.1 Annually .........................................................................................................6-17
6.10.2 Mass flow controllers ............................................................................................6-17
6.10.2.1 Annually (or as necessary).............................................................................6-17
6.10.3 Filters......................................................................................................................6-17
6.10.3.1 Annually (or as necessary).............................................................................6-17
6.11 Pump lubricants.............................................................................................................6-18
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-1 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.11.1 General.................................................................................................................. 6-18
6.11.2 Perfluorised polyethers ........................................................................................ 6-18
6.11.3 Hydrocarbon lubricants........................................................................................ 6-19
6.12 94-100-5-12A Cryo / heated -150 / 400C He lower electrode wafer clamping
plate changeover procedure ....................................................................................... 6-19
6.13 Adjusting the lower electrode wafer clamp clamping force .................................... 6-21
6.14 Automatic load lock end effector adjustments for different wafer sizes................ 6-22
Fig 6.1: 94-100-5-12A Cryo / heated -150 / 400C He lower electrode ................................. 6-20
Fig 6.2: Clamping force adjustment ...................................................................................... 6-21
Fig 6.3: End effector wafer size adjustments........................................................................ 6-22
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-2 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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Oxford Instruments Plasma Technology has global Customer Support Facilities to provide a co-
ordinated response to customer’s queries. All queries are recorded on our Support Database
and dealt with as quickly as possible. If we are not able to answer the query immediately, we
will contact you as soon as possible.
Before contacting a Customer Support Facility, please ensure that you have referred to the
appropriate section of your system manual, OEM manuals and electrical drawings.
Please direct all queries through your nearest support facility (see below) and have the
following details available.
System Type, e.g. mä~ëã~ä~ÄpóëíÉãNMM=etc.
Works Order No. – This can be found on the front cover of your system manual.
Contact Information – Your name, Company and how we can contact you.
Details of your query – nature of the problem, part numbers of spares required, etc.
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Maintenance
Printed: 22-Mar-06, 7:41 Page 6-3 of 22 UC Davis 94-721001 Issue 1: March 06