Utah-94-721002-System-Manual.pdf - 第121页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKN= `ìëíçãÉê=ëìééçêí=Ñ~ÅáäáíáÉë= Oxford Instruments Pla…
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
6.11.1 General.................................................................................................................. 6-18
6.11.2 Perfluorised polyethers ........................................................................................ 6-18
6.11.3 Hydrocarbon lubricants........................................................................................ 6-19
6.12 94-100-5-12A Cryo / heated -150 / 400C He lower electrode wafer clamping
plate changeover procedure ....................................................................................... 6-19
6.13 Adjusting the lower electrode wafer clamp clamping force .................................... 6-21
6.14 Automatic load lock end effector adjustments for different wafer sizes................ 6-22
Fig 6.1: 94-100-5-12A Cryo / heated -150 / 400C He lower electrode ................................. 6-20
Fig 6.2: Clamping force adjustment ...................................................................................... 6-21
Fig 6.3: End effector wafer size adjustments........................................................................ 6-22
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-2 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKN= `ìëíçãÉê=ëìééçêí=Ñ~ÅáäáíáÉë=
Oxford Instruments Plasma Technology has global Customer Support Facilities to provide a co-
ordinated response to customer’s queries. All queries are recorded on our Support Database
and dealt with as quickly as possible. If we are not able to answer the query immediately, we
will contact you as soon as possible.
Before contacting a Customer Support Facility, please ensure that you have referred to the
appropriate section of your system manual, OEM manuals and electrical drawings.
Please direct all queries through your nearest support facility (see below) and have the
following details available.
System Type, e.g. mä~ëã~ä~ÄpóëíÉãNMM=etc.
Works Order No. – This can be found on the front cover of your system manual.
Contact Information – Your name, Company and how we can contact you.
Details of your query – nature of the problem, part numbers of spares required, etc.
You can contact us via any of the following:
China
Beijing
Tel: +86 106518 8160
Email:
pt.support@oichina.cn
Shanghai
Tel: +8621 6360 8530
Email:
pt.support@oichaina.cn
Germany
Tel: +49 6122 937 161
Email:
info@oxford.de
Japan
Tel: +81 3 5245 3591
Email:
oikkpt@oxinst.co.jp
Singapore
Tel: +65 6337 6848
Email: pt.support@oxford-
instruments.com.sg
Taiwan
Tel: +886 3 5788696
Email:
pt.support@oxford-instruments.com.tw
UK
Customer Support Hotline: +44(0) 1934 837070
(0800 – 2000 UK local time)
Fax: +44(0) 1934 837071
Email:
pt.support@oxinst.co.uk
USA
Concord, MA
Tel: +1 978 9933 ext. 444
Toll Free: +1 800 447 4717 ext. 444
Fax: +1 978 369 8287
Email:
support.pt@ma.oxinst.com
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-3 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKO= dÉåÉê~ä=
WARNINGS
A) BEFORE STARTING ANY MAINTENANCE WORK, SWITCH OFF AND LOCK OFF THE
WALL-MOUNTED SAFETY ISOLATION BOX.
B) ENSURE THAT ONLY FULLY AND APPROPRIATELY QUALIFIED PERSONNEL ARE
ALLOWED TO WORK ON THE SYSTEM.
C) READ SECTION 1 - HEALTH AND SAFETY AT THE BEGINNING OF THIS MANUAL.
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
CAUTION
When changing or topping up oil in a pump, always use oil of the same brand
and type.
Always replace filters with those of a similar type and brand.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-4 of 22 Printed: 22-Mar-06, 7:41