Utah-94-721002-System-Manual.pdf - 第129页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKT= VQJNMMJRJNO^=`êóç=eÉ=äçïÉê=ÉäÉÅíêçÇÉ= WARNING BEFOR…
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKS= qçé=ÉäÉÅíêçÇÉ==
WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PROCESS CHAMBER, IT
MUST BE SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A
PROCESSING RUN.
SKSKN= jçåíÜäó=
1) Visually examine the top electrode for contamination. Any necessary cleaning should
be carried out using a lint-free cloth moistened with Isopropyl Alcohol (IPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
2) Examine the top electrode and its integral gas and water fittings for damage.
Carefully inspect gas inlet showerhead plates for signs of plasma concentrating in a
hole and enlarging the hole.
3) Examine the seal for signs of incipient deterioration.
SKSKO= páñJãçåíÜäó=Eíççäë=ïáíÜ=~=êÉãçî~ÄäÉ=ëÜçïÉêÜÉ~ÇF=
Check the condition of the gas inlet isolation assembly for any signs of brown discoloration of
the white PTFE. (It goes brown sometimes before failing with a major enlargement of the
through-holes.)
SKSKP= ^ååì~ääó=Eíççäë=Ü~îáåÖ=~ÅÅÉëë=íç=íÜÉ=Ö~ë=áåäÉí=áëçä~íáçå=~ëëÉãÄäó=Ñêçã=
íÜÉ=íçé=ëáÇÉ=çåäóF=
Check the condition of the gas inlet isolation assembly for any signs of brown discoloration of
the white PTFE. (It goes brown sometimes before failing with a major enlargement of the
through-holes.)
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-10 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKT= VQJNMMJRJNO^=`êóç=eÉ=äçïÉê=ÉäÉÅíêçÇÉ=
WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE PROCESS CHAMBER, IT
MUST BE SUBJECTED TO AT LEAST TWO VENT CYCLES SUBSEQUENT TO A
PROCESSING RUN.
SKTKN= jçåíÜäó=
1) Visually examine the substrate table for contamination. Any necessary cleaning
should be carried out using a lint-free cloth soaked in Isopropyl Alcohol (IPA).
WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
Examine the table and its integral heating and/or cooling systems for signs of damage.
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-11 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
SKU= VQJNMMJSJRMMLOMMs=ofb=RMMt=oc=ÖÉåÉê~íçê=L=lfmq=^jr=âáí=
SKUKN= qÜêÉÉJãçåíÜäó=
Ensure that the RF/microwave radiation leakage tests, detailed in Appendix A are carried out.
For details of maintenance required, refer to the manufacturer’s literature in Volume 3 of this
manual.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-12 of 22 Printed: 22-Mar-06, 7:41