Utah-94-721002-System-Manual.pdf - 第133页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~ =qÉÅÜåçäçÖó== mä~ëã~ä~Ä póëíÉãNMM WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . SKVKPKO= `äÉ~åáåÖ= WARNING ISOPROPYL ALCOHOL IS HIGHLY I…

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

WARNING

IF THE ELECTRONICS ARE DISCONNECTED FROM THE BODY TUBE AND THE BODY

TUBE IS LEFT CONNECTED TO A VACUUM SYSTEM, THEN IF A PLASMA DISCHARGE

IS MAINTAINED IN THE VICINITY OF THE BODY TUBE, THE ANODE AND GUARD RING

OF THE BODY TUBE ASSEMBLY MAY BECOME CHARGED UP.

SWITCH OFF THE POWER SUPPLY BEFORE REMOVING THE GAUGE FROM THE

VACUUM SYSTEM. HIGH VOLTAGES EXIST INTERNALLY IN THE GAUGE. THE

CONNECTING CABLE SHOULD BE REMOVED BEFORE ATTEMPTING TO DISMANTLE

THE GAUGE.

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The body tube assembly can be removed from the gauge by gripping the magnet housing

and twisting the body tube flange clockwise to unlock the bayonet fitting. The tube can then

be completely withdrawn from the gauge electronics / magnet housing.

The electrode can be removed from the body tube for cleaning / replacement as follows:

Using the flat spanner provided with the spares kit, locate the two lugs in the end of the

collar and rotate anti-clockwise to completely unscrew. Once the collar is removed, the anode

assembly and O-ring can be withdrawn.

The two cathode cups are removed from the flange end of the body tube by releasing the

circlip using a pair of circlip pliers. Note the correct orientation of the cups. The cup with the

reduced central hole size should be closest to the O-ring end of the body tube.

Re-assembly is the reverse procedure, taking care not to bend the anode, and ensuring that it

is centralised in the body tube when tightening the threaded collar.

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-14 of 22 Printed: 22-Mar-06, 7:41

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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WARNING

ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT

NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.

The cathode cups, body tube and anode assembly can be cleaned by firstly degreasing in a

proprietary degreasing agent, and then thoroughly soaking in a laboratory detergent. After

soaking, the parts should be thoroughly rinsed in clean water and then in Isopropyl Alcohol,

to remove all traces of water. The parts should be dried thoroughly.

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Refer to the manufacturer’s literature in Volume 3 for details of maintenance required. Also,

refer to Appendix B ‘Operation and Maintenance of Turbomolecular Pumps’.

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Ensure that the turbo pump temperature is sufficiently high, i.e. >50ºC. The turbo pump

temperature can be monitored on the turbo pump controller’s display. Refer to the pump

manufacturer’s manual for details. If the turbo pump temperature is too low, adjust the

manually-operated flow valve to reduce the flow rate of the turbo pump cooling water.

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The following instruction applies to conventionally greased bearing turbo pumps, e.g. the

Alcatel ATP series. It does not apply to Maglev turbo pumps.

To prevent damage to turbo pumps fitted to process chambers, OIPT strongly

recommends that bearing re-greasing is carried out periodically after

every 2500

hours of pump running time.

Details of re-greasing are given in sub-section 6.9.4.3.

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CAUTION

Failure to perform regular pump maintenance will result in pump warranty being

suspended.

Refer to the manufacturer’s manual in Volume 3 of this manual.

Alcatel ATP series turbo pumps are conventional greased bearing pumps. Periodically, these

bearings need to be re-greased.

The re-greasing interval depends on a number of factors; Refer to the graph in the

Maintenance section of the manufacturer’s manual to establish the re-greasing interval for

the pump in your system. Remember that turbo pumps fitted to process chambers

must be re-greased at 2500 hour intervals. The re-greasing interval for turbo pumps

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-15 of 22 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

fitted to load locks and transfer chambers is not so critical, therefore the manufacturer’s

recommendations can be used.

The ATP turbo pumps are supplied with series ACT intelligent controllers which are menu-

driven. The ‘SET-UP’ menu allows the re-greasing interval to be set so that a visual warning

with an optional audible alarm is displayed at the relevant time. Note that this visual warning

does not require any action immediately; it only indicates that the bearing should be re-

greased at the next available opportunity. If required, the visual warning and audible alarm

can be disabled via the ‘SET-UP’ menu.

When the pumps are supplied, the ACT controller is pre-set with a 5,000 hour re-grease

interval. If the pumps are running continuously, the visual re-grease warning will be

automatically triggered after approximately seven months.

The customer is advised to use the ‘SET-UP’ menu to set the re-greasing interval for the pump

fitted to his system. Refer to the pump manufacturer’s manual. Note that this change takes

approximately five minutes.

When the re-greasing time is reached, lubrication is carried out using a pre-loaded syringe to

apply a metered quantity of a specific grease to one point on the bearing. Refer to the pump

manufacturer’s manual. The Alcatel part numbers of the syringes are:

Pump Type Pre-loaded Syringe Part Number

ATP80 056993

150C/400HPC/900HPC 101924

Note that the grease syringe has a limited shelf life so shouldn’t be ordered from the Alcatel

service centre until it is needed. Alcatel exercises strict stock control on this item to ensure

that the grease is always in good condition.

Once the grease has been applied to the bearing, it needs to be evenly distributed around

the bearing. This is done automatically by using the ACT controller’s ‘RUNNING IN’ menu.

Note that the grease distribution takes approximately 2.5 hours.

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Some systems incorporate a bake-out collar fitted to the turbo pump to assist heating the

process chamber to approximately 50ºC - 60ºC.

If the flow rate of the cooling water to the turbo pump is too high, the pump will be over

cooled, thus reducing the heating effect of the bake-out collar.

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Refer to the manufacture’s literature for details of the maintenance required.

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-16 of 22 Printed: 22-Mar-06, 7:41