Utah-94-721002-System-Manual.pdf - 第134页
mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . fitted to load locks and transfer chambers is not so crit…
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
ISOPROPYL ALCOHOL IS HIGHLY INFLAMMABLE (FLAMMABLE). DO NOT USE IT
NEAR A NAKED FLAME OR ENERGISED ELECTRICAL EQUIPMENT.
The cathode cups, body tube and anode assembly can be cleaned by firstly degreasing in a
proprietary degreasing agent, and then thoroughly soaking in a laboratory detergent. After
soaking, the parts should be thoroughly rinsed in clean water and then in Isopropyl Alcohol,
to remove all traces of water. The parts should be dried thoroughly.
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Refer to the manufacturer’s literature in Volume 3 for details of maintenance required. Also,
refer to Appendix B ‘Operation and Maintenance of Turbomolecular Pumps’.
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Ensure that the turbo pump temperature is sufficiently high, i.e. >50ºC. The turbo pump
temperature can be monitored on the turbo pump controller’s display. Refer to the pump
manufacturer’s manual for details. If the turbo pump temperature is too low, adjust the
manually-operated flow valve to reduce the flow rate of the turbo pump cooling water.
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The following instruction applies to conventionally greased bearing turbo pumps, e.g. the
Alcatel ATP series. It does not apply to Maglev turbo pumps.
To prevent damage to turbo pumps fitted to process chambers, OIPT strongly
recommends that bearing re-greasing is carried out periodically after
every 2500
hours of pump running time.
Details of re-greasing are given in sub-section 6.9.4.3.
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CAUTION
Failure to perform regular pump maintenance will result in pump warranty being
suspended.
Refer to the manufacturer’s manual in Volume 3 of this manual.
Alcatel ATP series turbo pumps are conventional greased bearing pumps. Periodically, these
bearings need to be re-greased.
The re-greasing interval depends on a number of factors; Refer to the graph in the
Maintenance section of the manufacturer’s manual to establish the re-greasing interval for
the pump in your system. Remember that turbo pumps fitted to process chambers
must be re-greased at 2500 hour intervals. The re-greasing interval for turbo pumps
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-15 of 22 UC Davis 94-721001 Issue 1: March 06
mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
fitted to load locks and transfer chambers is not so critical, therefore the manufacturer’s
recommendations can be used.
The ATP turbo pumps are supplied with series ACT intelligent controllers which are menu-
driven. The ‘SET-UP’ menu allows the re-greasing interval to be set so that a visual warning
with an optional audible alarm is displayed at the relevant time. Note that this visual warning
does not require any action immediately; it only indicates that the bearing should be re-
greased at the next available opportunity. If required, the visual warning and audible alarm
can be disabled via the ‘SET-UP’ menu.
When the pumps are supplied, the ACT controller is pre-set with a 5,000 hour re-grease
interval. If the pumps are running continuously, the visual re-grease warning will be
automatically triggered after approximately seven months.
The customer is advised to use the ‘SET-UP’ menu to set the re-greasing interval for the pump
fitted to his system. Refer to the pump manufacturer’s manual. Note that this change takes
approximately five minutes.
When the re-greasing time is reached, lubrication is carried out using a pre-loaded syringe to
apply a metered quantity of a specific grease to one point on the bearing. Refer to the pump
manufacturer’s manual. The Alcatel part numbers of the syringes are:
Pump Type Pre-loaded Syringe Part Number
ATP80 056993
150C/400HPC/900HPC 101924
Note that the grease syringe has a limited shelf life so shouldn’t be ordered from the Alcatel
service centre until it is needed. Alcatel exercises strict stock control on this item to ensure
that the grease is always in good condition.
Once the grease has been applied to the bearing, it needs to be evenly distributed around
the bearing. This is done automatically by using the ACT controller’s ‘RUNNING IN’ menu.
Note that the grease distribution takes approximately 2.5 hours.
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Some systems incorporate a bake-out collar fitted to the turbo pump to assist heating the
process chamber to approximately 50ºC - 60ºC.
If the flow rate of the cooling water to the turbo pump is too high, the pump will be over
cooled, thus reducing the heating effect of the bake-out collar.
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Refer to the manufacture’s literature for details of the maintenance required.
Maintenance
UC Davis 94-721001 Issue 1: March 06 Page 6-16 of 22 Printed: 22-Mar-06, 7:41
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
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WARNING
BEFORE ATTEMPTING ANY MAINTENANCE WORK ON THE GAS HANDLING SYSTEM,
ELECTRICALLY ISOLATE THE SYSTEM BY SWITCHING OFF AND LOCKING OFF THE
WALL-MOUNTED SAFETY ISOLATION BOX. PROCESS GASES USED MAY BE TOXIC OR
FLAMMABLE. ADOPT THE CORRECT PROCEDURES WITH REGARD TO PURGING
BEFORE REMOVING OR LOOSENING COMPONENTS CARRYING THESE GASES. WEAR
PROTECTIVE CLOTHING.
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Ensure the gas pod and its fixings are secure.
IMPORTANT: OIPT gas pods typically weigh >40kg. Ensure the wall and gas pod
fixings are sturdy enough to bear at least four times the weight of
the gas pod.
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If valves need cleaning, repair or re-calibration:
1) Make sure valve has been thoroughly purged before removal.
2) Discuss with the vendor the return of the Mass Flow Controllers for service work.
Inform the vendor if hazardous gases have been used.
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The process gas filter elements will need replacing at a frequency that depends on both the
nature and purity of the process gases, and of other materials that come into contact with
them. The filters could need changing more or less often than annually.
1) Make sure line has been thoroughly purged before removal.
2) Unscrew union nut and remove assembly.
3) Tap filter element lightly on side with a fibre mallet to loosen and remove element.
4) Fit new element.
5) Re-assemble.
Maintenance
Printed: 22-Mar-06, 7:41 Page 6-17 of 22 UC Davis 94-721001 Issue 1: March 06