Utah-94-721002-System-Manual.pdf - 第138页

mä~ëã~ä~Ä póëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . THERMOCOUPLE CHAMBER BASE WA F E R CLAMP TA B L E DARK SP…

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

j) If it should become necessary to change from PFPE to mineral oil lubrication or vice

versa, the pump must be completely disassembled, freed of lubricant and fitted with

new gaskets and vanes.

k) At temperatures over 350

C, hazardous gaseous decomposition products are

formed. Therefore do not smoke in rooms where PFPE is used, and make sure that

no tobacco comes into contact with PFPE.

l) When handling PFPE, protective clothing must be used.

m) Do not mix PFPE with used oil. Dispose of them separately.

n) PFPE is normally odourless and colourless. Cloudiness or odour is a sign of

contamination.

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Where mineral oils are used, the rate of oil deterioration for a particular pump and process

should be established at an early stage, and oil changes based upon this information.

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Before carrying out a process, in the process chamber on a wafer which is a different size to

that last processed, it is necessary to fit the correct type of clamping plate. Clamping plates

are available for various sized wafers.

To change the clamping plate, use the following procedure (refer to Fig 6.1, page 6-20):

6) If necessary, vent the process chamber.

7) Open the process chamber lid.

8) Wearing powder-free gloves, unscrew the three clamping plate securing screws then

remove the clamping plate from the process chamber and place on a clean surface.

9) Take the replacement clamping plate and mount it on the three supporting pillars

then insert and tighten the three securing screws.

10) Close the process chamber lid.

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-19 of 22 UC Davis 94-721001 Issue 1: March 06

mä~ëã~ä~ÄpóëíÉãNMM lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

THERMOCOUPLE

CHAMBER

BASE

WAFER

CLAMP

TABLE

DARK SPACE

SHIELD

TABLE SUPPORT

TUBE

O RING

PUMPDOWN

PIPE FLANGE

FEEDTHROUGH

COMPONENTS

STAINLESS

STEEL

BELLOWS

SPRING

COMPRESSED

AIR CYLINDER

COMPRESSED

AIR CYLINDER

(ONE EACH SIDE

OF CLAMPING

PLATE)

WAFER

LIFT

ASSEMBLY

(FITS INSIDE

TABLE SUPPORT

TUBE)

Clamping

plate

Clamping

ring

Setscrew &

compression

spring (3-off

on each side

of clamping

ring)

3-pin wafer

support

Quartz

insert

SAFETY RELIEF

VALVE

CONTROL VALVE

LIQUID NITROGEN

OUT

HELIUM IN

Fig 6.1: 94-100-5-12A Cryo / heated -150 / 400C He lower electrode

Maintenance

UC Davis 94-721001 Issue 1: March 06 Page 6-20 of 22 Printed: 22-Mar-06, 7:41

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~ÄpóëíÉãNMM

WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

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To adjust the clamping force, use the following procedure (refer to Fig 6.1 and Fig 6.2):

11) Open the process chamber lid.

12) Wearing powder-free gloves, unscrew the three clamping plate securing screws then

remove the clamping plate from the process chamber and place it on a clean surface.

13) Using an M5 socket wrench, rotate the setscrews to adjust the length of compression

springs. Ensure that all six setscrews (i.e. three at each side of the clamping ring) are

rotated sequentially and equally.

NOTE: The nominal distance between the base of the clamping plate and the top

of the head of each setscew is 17mm to give a minimal clamping force. This

distance can be decreased to a minimum of 10mm to increase the clamping

force. Each spring gives a force of 1 Newton per mm compression, so for

example, a 5mm increase in compression (i.e. reducing the distance) on

each spring gives 5 x 6 = 30 Newtons increased clamping force.

Re-fit the clamping plate, reversing Step 2).

Close the process chamber lid.

17mm

Process

chamber

Clamping

ring

M5 x 40 Setscrew

cut overall length

down to 30mm

Compression

spring

G/SUN/SPG/012

Air cylinder

piston

top plate

Fig 6.2: Clamping force adjustment

Maintenance

Printed: 22-Mar-06, 7:41 Page 6-21 of 22 UC Davis 94-721001 Issue 1: March 06