Utah-94-721002-System-Manual.pdf - 第16页
mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety NKP= péÉÅáÑáÅ=e~ò~êÇë= NKPKN= bäÉÅíêáÅ~ä= WARNING HAZARDOUS VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY OR BURNS Any work requiring the re…
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Hazards and associated warnings relevant to Health and Safety which appear in the text of
this manual and in this section will fall into the following categories:
a) Electrical
(sub-section 1.3.1,
page 1-4)
The system carries voltages high enough to cause death or serious
injury. Even when the electrical power supply is isolated, electrical
energy at dangerous levels is stored by capacitors.
b) Electromagnetic
Radiation
(sub-section 1.3.2,
page 1-5)
Parts of the system produce electromagnetic radiation from audio
frequencies to 2.45 GHz. This radiation can have a field strength
strong enough to cause death or injury if not properly shielded.
c) Light
(sub-section 1.3.3,
page 1-6)
Ultra Violet (UV) or Laser light may be emitted in some systems.
These can cause permanent damage to the eyes or blindness if not
protected by the relevant shields or filters.
d) High Temperature
(sub-section1.3.4,
page 1-7)
Some components run at a temperature high enough to cause severe
burns.
e) Low Temperature
(sub-section 1.3.5,
page 1-7)
Components and gases at very low temperatures can cause severe
'burns' if allowed to contact the skin.
f) Gases
(sub-section 1.3.6,
page 1-8)
Some process gases and cleaning fluid vapour may be toxic, corrosive,
carcinogenic or flammable. They may also cause asphyxiation
through oxygen deprivation. Gases under pressure can, if applied to
the body, enter it and cause death or serious injury.
g) Materials
(sub-section 1.3.7,
page1-10)
Some materials used in the system can become toxic during use. If
this happens, then great care must be taken during maintenance to
prevent death or serious injury.
h) Process Chemicals
(sub-section 1.3.8,
page 1-12)
Some etching and deposition compounds are toxic during use, and
can leave toxic residues in the system.
i) Vacuum
(sub-section 1.3.9,
page 1-12)
Chambers or other components under partial vacuum represent
stored energy, which can cause injury if released carelessly.
j) Compressed Air
(sub-section 1.3.10,
page 1-13)
Compressed air can enter the body through the skin and cause
serious injury. Pneumatically operated system components can be
actuated suddenly, even when the system is not operating, causing
serious injury.
k) Mechanical
(sub-section 1.3.11,
page 1-13)
Injury can be caused by heavy components, sprung components,
deposition layers under stress, embrittled wire and machinery in
motion.
l) General
(sub-section 1.3.12,
page 1-14)
Various procedures must be studied and followed. These include
procedures specific to the system in question and also local and
national Health and Safety standards.
Health and Safety
Printed:29 May 2005, 06:31 Page 1-3 of 18 Issue 11: August 2004
mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety
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NKPKN= bäÉÅíêáÅ~ä=
WARNING
HAZARDOUS VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY OR BURNS
Any work requiring the removal of covers or panels must only be performed by
authorised personnel who are aware of the hazards involved.
Before removing any covers or panels, power down the system then carry out the
lock out / tag out procedure detailed in Section 6.
1.3.1.1 Parts of the system carry high voltages, which are capable of causing injury or death.
Take great care when carrying out maintenance tasks.
1.3.1.2 Do not operate the system if any of the doors, panels or covers are removed. Parts of
the system may still be 'live' even when shut down by a switch, blown fuse or control
function. Note that the system POWER OFF button does not isolate the main
distribution panel.
1.3.1.3 Ensure that all system units are connected to electrical earth (ground). For details of
the required electrical installation, refer to the ‘Services Specifications for
mä~ëã~ä~Ä and fçåÑ~Ä systems’ document which is included at the rear of this
manual’s binder.
1.3.1.4 During troubleshooting and calibration, the power supplies may need to be
connected with live components exposed. This work must only be carried out by
skilled personnel who are aware of the hazards involved.
1.3.1.5 Ensure that all safety interlocks are tested before the system is used for the first time
and at scheduled intervals thereafter. These tests must be carried out by
suitably qualified personnel.
1.3.1.6 Inspect the system regularly for damaged components, e.g. cables, connectors or
switches. Any components found damaged must be replaced before continuing to
operate the system. Refer to the instructions in the maintenance section of this
manual for details of any particular tests of the cables that may be required.
1.3.1.7 If any water leaks are detected, immediately switch the system off at the main
incoming circuit breaker.
1.3.1.8 No servicing is to be carried out unless all personnel involved fully understand the
danger of stored electrical energy. Refer to the lock out / tag out procedure detailed
in Section 6.
Health and Safety
Issue 11: August 2004 Page 1-4 of 18 Printed:29 May 2005, 06:31
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä
NKPKO= bäÉÅíêçã~ÖåÉíáÅ=o~Çá~íáçå=
WARNING
HAZARDOUS RF AND MICROWAVE EMISSIONS - EXPOSURE CAN CAUSE SEVERE
INJURY OR BURNS
Before operating the System On button, ensure that all RF and / or microwave
shielding is correctly fitted and that all connectors and flanges are in place.
1.3.2.1 Parts of the system produce electromagnetic radiation from audio frequencies to
2.45 GHz. At all frequencies within this range there is a field strength level at which
radiation can cause injury. Oxford Instruments Plasma Technology specifies limits for
the Electric and Magnetic field strengths within the environment of the system.
The system must be tested to ensure that radiation is within these limits, using
suitably calibrated equipment. The tests must be carried out after maintenance
involving RF shielding components, and routinely every three months. Refer to the
instructions in the maintenance section of this manual.
1.3.2.2 Ensure that all waveguide components, flanges and cables are correctly fitted,
secure and undamaged.
View ports on Plasmalab systems and on certain Ionfab systems are fitted with a
metal grid for shielding RF radiation. Replace this item only with the correct part,
and ensure that the ports are correctly reassembled.
If a metal grid is not fitted and there is any doubt about whether one should be
fitted, you must check with Oxford Instruments Plasma Technology before
proceeding. If the view port has been disassembled then tests must be carried out as
described in sub-section 1.3.2.1 above.
1.3.2.3 Operating the equipment with any panels removed increases the risk of RF burns.
Maintenance procedures, which require this, must only be performed by skilled
persons who have access to a suitable field strength meter.
1.3.2.4 Removing panels or modifying the equipment may increase the radio interference
emitted by the equipment above permitted levels. This may cause nearby equipment
to operate unexpectedly.
1.3.2.5 If portable transmitting equipment, e.g. radio, cellular phone, etc., is used within
two metres of the equipment, the equipment could operate unexpectedly.
Removing panels or modifying the equipment may increase this risk.
Health and Safety
Printed:29 May 2005, 06:31 Page 1-5 of 18 Issue 11: August 2004