Utah-94-721002-System-Manual.pdf - 第17页

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WARNING

HAZARDOUS VOLTAGE - CONTACT CAN CAUSE DEATH, SEVERE INJURY OR BURNS

Any work requiring the removal of covers or panels must only be performed by

authorised personnel who are aware of the hazards involved.

Before removing any covers or panels, power down the system then carry out the

lock out / tag out procedure detailed in Section 6.

1.3.1.1 Parts of the system carry high voltages, which are capable of causing injury or death.

Take great care when carrying out maintenance tasks.

1.3.1.2 Do not operate the system if any of the doors, panels or covers are removed. Parts of

the system may still be 'live' even when shut down by a switch, blown fuse or control

function. Note that the system POWER OFF button does not isolate the main

distribution panel.

1.3.1.3 Ensure that all system units are connected to electrical earth (ground). For details of

the required electrical installation, refer to the ‘Services Specifications for

mä~ëã~ä~Ä and fçåÑ~Ä systems’ document which is included at the rear of this

manual’s binder.

1.3.1.4 During troubleshooting and calibration, the power supplies may need to be

connected with live components exposed. This work must only be carried out by

skilled personnel who are aware of the hazards involved.

1.3.1.5 Ensure that all safety interlocks are tested before the system is used for the first time

and at scheduled intervals thereafter. These tests must be carried out by

suitably qualified personnel.

1.3.1.6 Inspect the system regularly for damaged components, e.g. cables, connectors or

switches. Any components found damaged must be replaced before continuing to

operate the system. Refer to the instructions in the maintenance section of this

manual for details of any particular tests of the cables that may be required.

1.3.1.7 If any water leaks are detected, immediately switch the system off at the main

incoming circuit breaker.

1.3.1.8 No servicing is to be carried out unless all personnel involved fully understand the

danger of stored electrical energy. Refer to the lock out / tag out procedure detailed

in Section 6.

Health and Safety

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WARNING

HAZARDOUS RF AND MICROWAVE EMISSIONS - EXPOSURE CAN CAUSE SEVERE

INJURY OR BURNS

Before operating the System On button, ensure that all RF and / or microwave

shielding is correctly fitted and that all connectors and flanges are in place.

1.3.2.1 Parts of the system produce electromagnetic radiation from audio frequencies to

2.45 GHz. At all frequencies within this range there is a field strength level at which

radiation can cause injury. Oxford Instruments Plasma Technology specifies limits for

the Electric and Magnetic field strengths within the environment of the system.

The system must be tested to ensure that radiation is within these limits, using

suitably calibrated equipment. The tests must be carried out after maintenance

involving RF shielding components, and routinely every three months. Refer to the

instructions in the maintenance section of this manual.

1.3.2.2 Ensure that all waveguide components, flanges and cables are correctly fitted,

secure and undamaged.

View ports on Plasmalab systems and on certain Ionfab systems are fitted with a

metal grid for shielding RF radiation. Replace this item only with the correct part,

and ensure that the ports are correctly reassembled.

If a metal grid is not fitted and there is any doubt about whether one should be

fitted, you must check with Oxford Instruments Plasma Technology before

proceeding. If the view port has been disassembled then tests must be carried out as

described in sub-section 1.3.2.1 above.

1.3.2.3 Operating the equipment with any panels removed increases the risk of RF burns.

Maintenance procedures, which require this, must only be performed by skilled

persons who have access to a suitable field strength meter.

1.3.2.4 Removing panels or modifying the equipment may increase the radio interference

emitted by the equipment above permitted levels. This may cause nearby equipment

to operate unexpectedly.

1.3.2.5 If portable transmitting equipment, e.g. radio, cellular phone, etc., is used within

two metres of the equipment, the equipment could operate unexpectedly.

Removing panels or modifying the equipment may increase this risk.

Health and Safety

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WARNING

LASER RADIATION - EXPOSURE CAN CAUSE SEVERE EYE DAMAGE OR BURNS

Before operating the system, ensure that all covers are fitted correctly.

Ensure that for laser equipment, the manufacturer’s instructions have been read

and fully understood.

1.3.3.1 Laser equipment when handled incorrectly or in a damaged condition can seriously

damage eyesight. Read and follow the manufacturer's instructions carefully. Ensure

that all covers supplied by Oxford Instruments Plasma Technology or by the

manufacturer are correctly fitted before the equipment is powered up.

WARNING

ULTRA VIOLET RADIATION - EXPOSURE CAN CAUSE SEVERE EYE DAMAGE OR BURNS

Ensure that all view ports are assembled correctly, and that any replacement filters

are of the correct specification.

1.3.3.2 View ports on Plasmalab systems are fitted with a clear plastic UV filter (Perspex -VE-

clear-003). Replace this item only with the correct part, and ensure that the ports are

correctly reassembled.

If a plastic filter is not fitted, or if there is any doubt about the type of filter that is

fitted, you must check with Oxford Instruments Plasma Technology before

proceeding.

1.3.3.3 The customer should be aware of the fact that view ports are available in glass or

quartz. Most view ports on Oxford Instruments Plasma Technology systems are glass,

but quartz is used in certain applications. Quartz view ports allow much more UV

light to pass through than glass does, and so present a greater hazard. They will

require very careful shielding or filtering in

ALL situations on Plasmalab and Ionfab

systems.

Be careful if the service history of the system is not fully known. It is possible that a

glass view port has been changed for a quartz one.

1.3.3.4 UV light can also escape from other parts of the system, e.g. from ICP plasma

sources, and downstream plasma discharge tubes. Discharge tubes of this type are

often made of quartz, and so very careful shielding or filtering is needed.

1.3.3.5 UV light can produce ozone from ambient air. Detectable quantities are produced

by ICP sources fitted with a quartz tube. Local extraction must be used in this case.

Health and Safety

Issue 11: August 2004 Page 1-6 of 18 Printed:29 May 2005, 06:31