Utah-94-721002-System-Manual.pdf - 第177页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅ ÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä WARNING BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY . 4) Prepare the system frames for transport by disconnec…
mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
13) Disconnect the extraction collars on the process chamber(s) (e.g. ICP process
chambers) and the gas pod from the extraction systems.
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Remove any hazardous residues/deposits from the process chamber, ion sources, pumps and
pump lines, gas lines and mass flow controllers in accordance with local safety regulations.
Refer to equipment manufacturer’s manuals as necessary.
Note that if the system is to be moved and re-installed, it may be acceptable to purge the gas
lines / mass flow controllers and ion sources (if fitted) with dry nitrogen and seal all
connections.
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WARNING
LIFTING HEAVY OBJECTS INCORRECTLY CAN CAUSE SEVERE INJURY
When handling heavy system components such as the system unit or vacuum pumps,
ensure that the appropriate lifting equipment, operated by fully trained personnel, is
used.
When heavy rack-mounted components are handled, ensure that the weight is safely
distributed between sufficient personnel.
WARNING
TOPPLING (TIPOVER) HAZARD – SOME SYSTEM COMPONENTS, E.G. ROBOTIC HANDLERS
AND AUTOMATIC LOAD LOCKS / TRANSFER CHAMBERS (ESPECIALLY IF FITTED WITH
CASSETTE LOAD LOCKS) CAN TOPPLE CAUSING SEVERE INJURY.
When transporting or manoeuvring the system frames, robotic handlers etc., ensure
that they remain vertical at all times and use the appropriate lifting / handling
equipment.
Ensure that any support frames, supplied with the system, are correctly fitted
whenever the system is transported / manoeuvred or dismantled for service /
maintenance.
It is entirely the user’s responsibility to ensure that all components are supported
safely before and during any transporting, manoeuvring or maintenance operations.
Support frames provided by Oxford Instruments Plasma Technology are not
necessarily adequate for any such operations. The absence of a support frame must
not be taken as an indication that no further precautions need to be made before
such operations are undertaken.
1) In the grey area, remove the rotary vane pump from its mounting and prepare it for
transport in accordance with the pump manufacturer’s instructions. Refer to the
manufacturer’s literature in Volume 3 of this manual.
2) Remove the gas pod from its mounting and prepare it for transport.
3) Prepare the system PC for transport.
Uninstallation and Disposal
Issue 1: February 00 Page 8-4 of 6 Printed: 25-May-05, 10:18
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
4) Prepare the system frames for transport by disconnecting processing modules from
the transfer chamber (if applicable) and fitting the castor assemblies.
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This sub-section gives guidance for disposing of the system at the end of its life. The disposal
must be carried out in accordance with local safety regulations.
To dispose the system, use the following procedure:
1) Carry out the uninstallation procedure given in sub-section 8.2, page 8-2
2) Locate, remove and dispose of any hazardous materials in accordance with local
safety regulations, e.g. batteries, o-rings, oil etc. Refer to manufacturer’s manuals.
3) Dispose of the remainder of the system in accordance with local safety regulations.
Uninstallation and Disposal
Printed: 25-May-05, 10:18 Page 8-5 of 6 Issue 1: February 00
mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
WARNING
BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.
NOTES:
Uninstallation and Disposal
Issue 1: February 00 Page 8-6 of 6 Printed: 25-May-05, 10:18