Utah-94-721002-System-Manual.pdf - 第179页

System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅ ÜåçäçÖó== mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä ^ééÉåÇáñ=^= jÉ~ëìêÉãÉåí=çÑ=ê~Çáç=ÑêÉèìÉåÅó=~åÇ= ãáÅêçï~îÉ=Éãáëëáçåë= 1. Scope of testing ........................................................…

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WARNING

BEFORE PROCEEDING WITH ANY MAINTENANCE WORK, READ SECTION 1 - HEALTH AND SAFETY.

NOTES:

Uninstallation and Disposal

Issue 1: February 00 Page 8-6 of 6 Printed: 25-May-05, 10:18

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Scope of testing ...................................................................................................................... 2

2. Method of testing................................................................................................................... 2

3. Acceptable exposure standards............................................................................................. 3

4. System design ......................................................................................................................... 3

Measurement of RF & Microwave Emissions

Printed: 21-Dec-04, 13:43 Page 1 of 4 Issue 2: December 01

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WARNING

THIS APPENDIX COVERS ALL OF THE CURRENT REQUIREMENTS

FOR THE MEASUREMENT OF RADIO FREQUENCY AND

MICROWAVE EMISSIONS FOR THE OXFORD INSTRUMENTS

PLASMA TECHNOLOGY'S RANGE OF PRODUCTS. ENSURE THAT

THE ENTIRE APPENDIX IS READ AND UNDERSTOOD BY ALL

INVOLVED PERSONNEL AND THAT THE TESTS RELEVANT TO THE

INSTALLED SYSTEM ARE CARRIED OUT AT THE SPECIFIED

PERIODICITY.

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Systems which contain RF generators, both Ion Beam and Plasma systems will be tested for the emission of

energy prior to shipment. They will also be tested routinely every three months during use, or as required

by safety standards at the customer's site, if this is more frequent.

Systems must also be tested after maintenance, if the maintenance has involved RF shielding components

such as covers and viewports, or components in the process chamber such as feedthroughs and vacuum

gauges.

Systems with RF generators in the frequency range of 0.1 MHz to 27.12 MHz must be tested for emissions

by measuring separately both the electric (E) and magnetic (H) field strengths. Either field can be a safety

hazard, hence the need to test both.

Systems with microwave frequency generators at 2.45 GHz will only be tested for power, usually by

measuring the electric (E) field.

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Suitable test meters are the Narda

8511 for 1.7MHz to 2.1MHz, the Narda 8512 for 13.56 MHz and 27.12

MHz, and the Holaday

1501 for 2.45 GHz. Equivalent meters from other vendors are acceptable. The test

meter MUST have a current calibration certificate. Note that if an alternative 13.56 MHz meter is used, it

should be able to detect the presence of 27.12 MHz as well as 13.56 MHz.

Testing must be performed on the system in its normal operating configuration, with the usual covers and

components in place. The system must be operating at maximum reasonable power, and must be tested

both in the presence and the absence of plasma.

The field strength must be measured 50 mm (2 inches) away from the system, at all points that can be

reached by hand with the probe (If parts of the system are inaccessible from the ground, a stepladder

must be used). The probes of the above meters are designed so that the correct distance is obtained if the

head of the probe is touching the system.

Particular attention must be given to viewports, doors and flanges, the automatch unit, and the whole

length of waveguides and RF power cables. If viewports are fitted with shutters, then tests must be made

with the shutter both open and shut. All cables leaving gauges and other feedthroughs in the process

chamber and the pumping system are suspect, and must be checked along their entire length. The

pumping system and any separate system racks and power box must also be checked.

The Narda Microwave Corporation, Plainview, New York 11803.

Holaday Industries Inc, 14825 Martin Drive, Eden Prairie, MN 55344.

Measurement of RF & Microwave Emissions

Issue 2: December 01 Page 2 of 4 Printed: 21-Dec-04, 13:43