Utah-94-721002-System-Manual.pdf - 第18页

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WARNING

HAZARDOUS RF AND MICROWAVE EMISSIONS - EXPOSURE CAN CAUSE SEVERE

INJURY OR BURNS

Before operating the System On button, ensure that all RF and / or microwave

shielding is correctly fitted and that all connectors and flanges are in place.

1.3.2.1 Parts of the system produce electromagnetic radiation from audio frequencies to

2.45 GHz. At all frequencies within this range there is a field strength level at which

radiation can cause injury. Oxford Instruments Plasma Technology specifies limits for

the Electric and Magnetic field strengths within the environment of the system.

The system must be tested to ensure that radiation is within these limits, using

suitably calibrated equipment. The tests must be carried out after maintenance

involving RF shielding components, and routinely every three months. Refer to the

instructions in the maintenance section of this manual.

1.3.2.2 Ensure that all waveguide components, flanges and cables are correctly fitted,

secure and undamaged.

View ports on Plasmalab systems and on certain Ionfab systems are fitted with a

metal grid for shielding RF radiation. Replace this item only with the correct part,

and ensure that the ports are correctly reassembled.

If a metal grid is not fitted and there is any doubt about whether one should be

fitted, you must check with Oxford Instruments Plasma Technology before

proceeding. If the view port has been disassembled then tests must be carried out as

described in sub-section 1.3.2.1 above.

1.3.2.3 Operating the equipment with any panels removed increases the risk of RF burns.

Maintenance procedures, which require this, must only be performed by skilled

persons who have access to a suitable field strength meter.

1.3.2.4 Removing panels or modifying the equipment may increase the radio interference

emitted by the equipment above permitted levels. This may cause nearby equipment

to operate unexpectedly.

1.3.2.5 If portable transmitting equipment, e.g. radio, cellular phone, etc., is used within

two metres of the equipment, the equipment could operate unexpectedly.

Removing panels or modifying the equipment may increase this risk.

Health and Safety

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WARNING

LASER RADIATION - EXPOSURE CAN CAUSE SEVERE EYE DAMAGE OR BURNS

Before operating the system, ensure that all covers are fitted correctly.

Ensure that for laser equipment, the manufacturer’s instructions have been read

and fully understood.

1.3.3.1 Laser equipment when handled incorrectly or in a damaged condition can seriously

damage eyesight. Read and follow the manufacturer's instructions carefully. Ensure

that all covers supplied by Oxford Instruments Plasma Technology or by the

manufacturer are correctly fitted before the equipment is powered up.

WARNING

ULTRA VIOLET RADIATION - EXPOSURE CAN CAUSE SEVERE EYE DAMAGE OR BURNS

Ensure that all view ports are assembled correctly, and that any replacement filters

are of the correct specification.

1.3.3.2 View ports on Plasmalab systems are fitted with a clear plastic UV filter (Perspex -VE-

clear-003). Replace this item only with the correct part, and ensure that the ports are

correctly reassembled.

If a plastic filter is not fitted, or if there is any doubt about the type of filter that is

fitted, you must check with Oxford Instruments Plasma Technology before

proceeding.

1.3.3.3 The customer should be aware of the fact that view ports are available in glass or

quartz. Most view ports on Oxford Instruments Plasma Technology systems are glass,

but quartz is used in certain applications. Quartz view ports allow much more UV

light to pass through than glass does, and so present a greater hazard. They will

require very careful shielding or filtering in

ALL situations on Plasmalab and Ionfab

systems.

Be careful if the service history of the system is not fully known. It is possible that a

glass view port has been changed for a quartz one.

1.3.3.4 UV light can also escape from other parts of the system, e.g. from ICP plasma

sources, and downstream plasma discharge tubes. Discharge tubes of this type are

often made of quartz, and so very careful shielding or filtering is needed.

1.3.3.5 UV light can produce ozone from ambient air. Detectable quantities are produced

by ICP sources fitted with a quartz tube. Local extraction must be used in this case.

Health and Safety

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WARNING

HOT SURFACES - CLOSE CONTACT CAN CAUSE SERIOUS INJURY AND BURNS

Allow sufficient time for heated components (e.g. heated lower electrodes) to cool

to room temperature before carrying out maintenance.

1.3.4.1 During operation of the system some components can become dangerously hot.

Always allow time for these to cool to a safe temperature before handling them.

Components that become hot include electrically heated chambers, chamber

liners, lower electrodes, specimen holders and halogen lamps. Items illuminated by

halogen lamps can also reach very high temperatures.

Note that items such as neutralizers, ion sources, and ICP sources operate at high

temperatures.

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WARNING

COLD OBJECTS - CONTACT CAN CAUSE SERIOUS INJURY TO THE SKIN AND CAN CAUSE

THE SKIN TO ADHERE TO THE COLD OBJECT

Allow sufficient time for cold components (e.g. cryogenically cooled lower

electrodes) to return to room temperature before carrying out maintenance.

If cold objects must be handled, ensure that suitable protective clothing is worn.

1.3.5.1 Beware of the extreme cold produced in refrigerated or cryogenically cooled

systems. Contact with the skin by components at these temperatures can produce

'burns'. Allow the cooling system to reach a safe temperature before attempting

any maintenance tasks.

Components that become cold include cryogenically cooled lower electrodes,

cryogenic pumps and components that use liquid nitrogen.

Health and Safety

Printed:29 May 2005, 06:31 Page 1-7 of 18 Issue 11: August 2004