Utah-94-721002-System-Manual.pdf - 第182页
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It is strongly recommended that the operation of all safety interlocks should be tested at the same time,
whenever an RF or Microwave leakage test is performed.
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Readings must be equal to or less than the levels shown in Table 1 at all points. Exceptions will only be
permitted in certain special circumstances. These exceptions will be clearly documented in the system
instructions. In all other situations, these standards must be strictly met.
Frequency Electric Field (E) Magnetic field (H)
V/m mW/cm
2
A/m mW/cm
2
0.1 to 1 MHz 614 16.3/f
1.7 to 2.1 MHz 614 16.3/f
13.56 MHz and 27.12 MHz 1842/f 900/f
2
16.3/f 10000/f
2
2.45 GHz f/300 f/300
Note – f is the frequency in MHz
Reference: ANSI/IEEE C95.1 maximum permissible exposure for controlled
environments.
Table 1 - Maximum permitted field strengths
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RF and Microwave components such as RF ion sources may be purchased from Oxford Instruments Plasma
Technology and fitted to the customer's system. Such an installation requires a system designed to
prevent leakage of RF and Microwave emissions, and requires careful testing by the installer before use.
It is not possible to give a full list of necessary safety precautions, and advice should be sought from a
competent authority. However, some of the points to be considered are as follows:
(a) The system and all of its assemblies should be very well grounded (earthed), using low impedance
straps, and ensuring impedances between power supplies and the chamber of ≤ 0.1 Ohms at 25 A.
(b) Viewports should be shielded with fine conducting mesh to prevent the transmission of RF and
Microwave energy, and should be filtered to prevent the transmission of UV light.
(c) Doors and flanges should provide metal-to-metal contact. In case of doubt, and in the case of
access doors, the use of copper beryllium finger strips or wire mesh over elastomer core (e.g.
Zemrex products from Warth International
3
should be considered. Small flanges in the vacuum
system should be joined with metal clamps, not plastic.
(d) All types of electrical feedthrough and vacuum gauges, together with cables leaving them, may
need shielding.
(e) Interlocks will need to be wired into the system to ensure safe operation. These will include
interlocks with the system access door, the customer's water supply to the RF product, and the
system vacuum. The product purchased from Oxford Instruments Plasma Technology will also have
interlock switches. These interlocks must all force the disconnection of power from the RF,
Microwave and HV power supplies if they are opened. See the product manual for more details.
3
Warth International Ltd, Charlswood Road, East Grinstead, Sussex, England, RH19 2HH.
Measurement of RF & Microwave Emissions
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NOTES:
Measurement of RF & Microwave Emissions
Issue 2: December 01 Page 4 of 4 Printed: 21-Dec-04, 13:43
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Appendix B
Operation and maintenance of turbomolecular pumps ........................................... 1
1 Maintenance for all Turbo Pumps.......................................................................................... 2
2 Maintenance for Alcatal ATP/ACT Turbo pumps................................................................... 3
2.1 Re-greasing of turbo pumps fitted to process chambers......................................................................3
2.2 2000 to 8000 hours (3 to 12 months): pump relubrication...................................................................3
Operation and Maintenance of Turbo Pumps
Printed: 21-Dec-04, 13:44 Page 1 of 4 Issue 3: June 02