Utah-94-721002-System-Manual.pdf - 第183页
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Measurement of RF & Microwave Emissions
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Appendix B
Operation and maintenance of turbomolecular pumps ........................................... 1
1 Maintenance for all Turbo Pumps.......................................................................................... 2
2 Maintenance for Alcatal ATP/ACT Turbo pumps................................................................... 3
2.1 Re-greasing of turbo pumps fitted to process chambers......................................................................3
2.2 2000 to 8000 hours (3 to 12 months): pump relubrication...................................................................3
Operation and Maintenance of Turbo Pumps
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Please note that premature failure of Turbomolecular Pumps can be caused by failing to
observe the following recommendations:
a) Always follow the maintenance and operating instructions contained in the
manufacturers' manuals, copies of which are provided within the system manuals.
Note that with some types of pump the lubricant should be replaced when the
total running time reaches 500 hours.
b) When corrosive process gases are being used always purge the turbo pump with
dry nitrogen during a processing run. If the process chamber is to be vented
adequate time must first be allowed for the process gases to be pumped away.
c) If corrosive process gases are used in a system with no gate valve between the
turbo pump and the process chamber and the system is to be left for more than
one hour with the turbo pump not running, proceed as follows:
1) Turn off all the manual gas taps on the process gas lines. Also turn off the
gas taps on the process gas cylinders.
2) Close the chamber door.
3) Pump the process chamber and turbo pump down to approximately 1 x 10
-4
millibars.
4) Vent the process chamber and turbo pump to atmospheric pressure with dry
nitrogen. Do not allow the chamber door to open.
5) Repeat Steps 3 and 4 three times.
6) Seal the process chamber and turbo pump.
d) If corrosive process gases are used in a system with a gate valve between the
turbo pump and the process chamber and the system is to be left for more than
one hour with the turbo pump not running, proceed as follows:
1) With the exception of the Argon and Nitrogen lines, turn off all the manual
gas taps on the process gas lines and also turn off the gas taps on the process
gas cylinders.
2) Close the chamber door.
3) Run a 'process' sequence (without any samples loaded) using only Argon or
Nitrogen as process gases for at least 10 minutes.
4) Vent the process chamber and vent the turbo pump to atmospheric pressure
with dry nitrogen. Do not allow the chamber door to open.
5) Pump the process chamber and the turbo pump down to 1 x 10
-4
millibars
and then vent them with dry nitrogen.
6) Repeat Step 5 three times.
7) Seal the process chamber and the turbo pump.
Operation and Maintenance of Turbo Pumps
Issue 3: June 02 Page 2 of 4 Printed: 21-Dec-04, 13:44