Utah-94-721002-System-Manual.pdf - 第184页

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Appendix B

Operation and maintenance of turbomolecular pumps ........................................... 1

1 Maintenance for all Turbo Pumps.......................................................................................... 2

2 Maintenance for Alcatal ATP/ACT Turbo pumps................................................................... 3

2.1 Re-greasing of turbo pumps fitted to process chambers......................................................................3

2.2 2000 to 8000 hours (3 to 12 months): pump relubrication...................................................................3

Operation and Maintenance of Turbo Pumps

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Please note that premature failure of Turbomolecular Pumps can be caused by failing to

observe the following recommendations:

a) Always follow the maintenance and operating instructions contained in the

manufacturers' manuals, copies of which are provided within the system manuals.

Note that with some types of pump the lubricant should be replaced when the

total running time reaches 500 hours.

b) When corrosive process gases are being used always purge the turbo pump with

dry nitrogen during a processing run. If the process chamber is to be vented

adequate time must first be allowed for the process gases to be pumped away.

c) If corrosive process gases are used in a system with no gate valve between the

turbo pump and the process chamber and the system is to be left for more than

one hour with the turbo pump not running, proceed as follows:

1) Turn off all the manual gas taps on the process gas lines. Also turn off the

gas taps on the process gas cylinders.

2) Close the chamber door.

3) Pump the process chamber and turbo pump down to approximately 1 x 10

-4

millibars.

4) Vent the process chamber and turbo pump to atmospheric pressure with dry

nitrogen. Do not allow the chamber door to open.

5) Repeat Steps 3 and 4 three times.

6) Seal the process chamber and turbo pump.

d) If corrosive process gases are used in a system with a gate valve between the

turbo pump and the process chamber and the system is to be left for more than

one hour with the turbo pump not running, proceed as follows:

1) With the exception of the Argon and Nitrogen lines, turn off all the manual

gas taps on the process gas lines and also turn off the gas taps on the process

gas cylinders.

2) Close the chamber door.

3) Run a 'process' sequence (without any samples loaded) using only Argon or

Nitrogen as process gases for at least 10 minutes.

4) Vent the process chamber and vent the turbo pump to atmospheric pressure

with dry nitrogen. Do not allow the chamber door to open.

5) Pump the process chamber and the turbo pump down to 1 x 10

-4

millibars

and then vent them with dry nitrogen.

6) Repeat Step 5 three times.

7) Seal the process chamber and the turbo pump.

Operation and Maintenance of Turbo Pumps

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The following instruction applies to conventionally greased bearing turbo pumps, e.g. the Alcatel ATP

series. It does not apply to Maglev turbo pumps.

To prevent damage to turbo pumps fitted to process chambers, OIPT strongly recommends

that bearing re-greasing is carried out periodically after

every 2500 hours of pump running

time.

Details of re-greasing are given in the following sub-section.

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CAUTION

Failure to perform regular pump maintenance will result in pump warranty

being suspended.

Refer to the manufacturer’s manual in Volume 3 of this manual.

Alcatel ATP series turbo pumps are conventional greased bearing pumps. Periodically, these bearings

need to be re-greased.

The re-greasing interval depends on a number of factors; Refer to the graph in the Maintenance section

of the manufacturer’s manual to establish the re-greasing interval for the pump in your system.

Remember that turbo pumps fitted to process chambers must be re-greased at 2500 hour

intervals. The re-greasing interval for turbo pumps fitted to load locks and transfer chambers is not so

critical, therefore the manufacturer’s recommendations can be used.

The ATP turbo pumps are supplied with series ACT intelligent controllers which are menu-driven. The

‘SET-UP’ menu allows the re-greasing interval to be set so that a visual warning with an optional audible

alarm is displayed at the relevant time. Note that this visual warning does not require any action

immediately; it only indicates that the bearing should be re-greased at the next available opportunity. If

required, the visual warning and audible alarm can be disabled via the ‘SET-UP’ menu.

When the pumps are supplied, the ACT controller is pre-set with a 5,000 hour re-grease interval. If the

pumps are running continuously, the visual re-grease warning will be automatically triggered after

approximately seven months.

The customer is advised to use the ‘SET-UP’ menu to set the re-greasing interval for the pump fitted to his

system. Refer to the pump manufacturer’s manual. Note that this change takes approximately five

minutes.

When the re-greasing time is reached, lubrication is carried out using a pre-loaded syringe to apply a

metered quantity of a specific grease to one point on the bearing. Refer to the pump manufacturer’s

manual. The Alcatel part numbers of the syringes are:

Pump Type Pre-loaded Syringe Part

Number

ATP80 056993

150C/400HPC/900HPC 101924

Operation and Maintenance of Turbo Pumps

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