Utah-94-721002-System-Manual.pdf - 第186页
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The following instruction applies to conventionally greased bearing turbo pumps, e.g. the Alcatel ATP
series. It does not apply to Maglev turbo pumps.
To prevent damage to turbo pumps fitted to process chambers, OIPT strongly recommends
that bearing re-greasing is carried out periodically after
every 2500 hours of pump running
time.
Details of re-greasing are given in the following sub-section.
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CAUTION
Failure to perform regular pump maintenance will result in pump warranty
being suspended.
Refer to the manufacturer’s manual in Volume 3 of this manual.
Alcatel ATP series turbo pumps are conventional greased bearing pumps. Periodically, these bearings
need to be re-greased.
The re-greasing interval depends on a number of factors; Refer to the graph in the Maintenance section
of the manufacturer’s manual to establish the re-greasing interval for the pump in your system.
Remember that turbo pumps fitted to process chambers must be re-greased at 2500 hour
intervals. The re-greasing interval for turbo pumps fitted to load locks and transfer chambers is not so
critical, therefore the manufacturer’s recommendations can be used.
The ATP turbo pumps are supplied with series ACT intelligent controllers which are menu-driven. The
‘SET-UP’ menu allows the re-greasing interval to be set so that a visual warning with an optional audible
alarm is displayed at the relevant time. Note that this visual warning does not require any action
immediately; it only indicates that the bearing should be re-greased at the next available opportunity. If
required, the visual warning and audible alarm can be disabled via the ‘SET-UP’ menu.
When the pumps are supplied, the ACT controller is pre-set with a 5,000 hour re-grease interval. If the
pumps are running continuously, the visual re-grease warning will be automatically triggered after
approximately seven months.
The customer is advised to use the ‘SET-UP’ menu to set the re-greasing interval for the pump fitted to his
system. Refer to the pump manufacturer’s manual. Note that this change takes approximately five
minutes.
When the re-greasing time is reached, lubrication is carried out using a pre-loaded syringe to apply a
metered quantity of a specific grease to one point on the bearing. Refer to the pump manufacturer’s
manual. The Alcatel part numbers of the syringes are:
Pump Type Pre-loaded Syringe Part
Number
ATP80 056993
150C/400HPC/900HPC 101924
Operation and Maintenance of Turbo Pumps
Printed: 21-Dec-04, 13:44 Page 3 of 4 Issue 3: June 02
mä~ëã~ä~Ä=~åÇ=fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
Note that the grease syringe has a limited shelf life so shouldn’t be ordered from the Alcatel service
centre until it is needed. Alcatel exercises strict stock control on this item to ensure that the grease is
always in good condition.
Once the grease has been applied to the bearing, it needs to be evenly distributed around the bearing.
This is done automatically by using the ACT controller’s ‘RUNNING IN’ menu. Note that the grease
distribution takes approximately 2.5 hours.
Operation and Maintenance of Turbo Pumps
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Appendix C
Concessions................................................................................................................... 1
1.1 General.....................................................................................................................................................2
Concessions
Printed: 23-Jul-05, 10:23 Page 1 of 2 Issue 1: June 02