Utah-94-721002-System-Manual.pdf - 第198页

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Modular Cluster System – ICP 180

Issue 5: June 2005 Page 1 of 18

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Change record sheet

Issue No. Details of change Date

4 Change Record sheet added. Service space note added to

Fig 1, Fig 2 & Fig 3.

1 November 04

5 Sub-section 5.2 – cooling water connector sizes changed.

Fig 4 updated.

1 June 05

Installation Data (ICP 180)

Issue 5: June 05 Page 2 of 18 Printed: 22-Mar-06, 6:57

Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM

Contents

Page

Change record sheet.......................................................................................................... 2

1. Introduction ................................................................................................................ 4

2. Installation information.............................................................................................5

2.1 Dimensions..........................................................................................................................5

2.2 Weights...............................................................................................................................5

2.3 Heat load ............................................................................................................................5

3. Services connections .................................................................................................. 9

4. Gas handling ............................................................................................................. 11

5. Services...................................................................................................................... 14

5.1 Electrical Supply requirement .........................................................................................14

5.2 Water Cooling requirement............................................................................................14

5.3 Lower Electrode Cooling requirement ...........................................................................14

5.4 Compressed Air requirement ..........................................................................................14

5.5 Nitrogen requirement......................................................................................................15

5.6 Process gas requirement..................................................................................................15

5.7 Helium requirement.........................................................................................................15

5.8 Extraction requirement....................................................................................................15

6. Pump set information .............................................................................................. 16

6.1 Rotary pump purging.......................................................................................................16

7. Heater/chiller information ....................................................................................... 16

8. Interlocks................................................................................................................... 17

9. OIPT locations worldwide ........................................................................................ 18

Fig 1: ICP 180 system layout (3-frame)........................................................................................6

Fig 2: ICP 180 system layout (3-frame cluster upgradeable)......................................................7

Fig 3: ICP 180 Layout (2-frame cluster upgradeable).................................................................8

Fig 4: ICP 180 services panel.........................................................................................................9

Fig 5: Electrical connections.......................................................................................................10

Fig 6: 6-line gas pod ...................................................................................................................11

Fig 7: 6-line gas pod mounted on optional free-standing frame ...........................................12

Fig 8: 12-line gas pod .................................................................................................................13

Installation Data (ICP 180)

Printed: 22-Mar-06, 6:57 Page 3 of 18 Issue 5: June 05