Utah-94-721002-System-Manual.pdf - 第199页

Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM Contents Page Change record sheet.......................................................................................................... 2 1…

mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data

Change record sheet

Issue No. Details of change Date

4 Change Record sheet added. Service space note added to

Fig 1, Fig 2 & Fig 3.

1 November 04

5 Sub-section 5.2 – cooling water connector sizes changed.

Fig 4 updated.

1 June 05

Installation Data (ICP 180)

Issue 5: June 05 Page 2 of 18 Printed: 22-Mar-06, 6:57

Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM

Contents

Page

Change record sheet.......................................................................................................... 2

1. Introduction ................................................................................................................ 4

2. Installation information.............................................................................................5

2.1 Dimensions..........................................................................................................................5

2.2 Weights...............................................................................................................................5

2.3 Heat load ............................................................................................................................5

3. Services connections .................................................................................................. 9

4. Gas handling ............................................................................................................. 11

5. Services...................................................................................................................... 14

5.1 Electrical Supply requirement .........................................................................................14

5.2 Water Cooling requirement............................................................................................14

5.3 Lower Electrode Cooling requirement ...........................................................................14

5.4 Compressed Air requirement ..........................................................................................14

5.5 Nitrogen requirement......................................................................................................15

5.6 Process gas requirement..................................................................................................15

5.7 Helium requirement.........................................................................................................15

5.8 Extraction requirement....................................................................................................15

6. Pump set information .............................................................................................. 16

6.1 Rotary pump purging.......................................................................................................16

7. Heater/chiller information ....................................................................................... 16

8. Interlocks................................................................................................................... 17

9. OIPT locations worldwide ........................................................................................ 18

Fig 1: ICP 180 system layout (3-frame)........................................................................................6

Fig 2: ICP 180 system layout (3-frame cluster upgradeable)......................................................7

Fig 3: ICP 180 Layout (2-frame cluster upgradeable).................................................................8

Fig 4: ICP 180 services panel.........................................................................................................9

Fig 5: Electrical connections.......................................................................................................10

Fig 6: 6-line gas pod ...................................................................................................................11

Fig 7: 6-line gas pod mounted on optional free-standing frame ...........................................12

Fig 8: 12-line gas pod .................................................................................................................13

Installation Data (ICP 180)

Printed: 22-Mar-06, 6:57 Page 3 of 18 Issue 5: June 05

mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data

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This installation specification document gives information about the mä~ëã~ä~ÄpóëíÉãNMM

enable customers to prepare the required environment for the system.

Note that all dimensions shown in these data sheets are typical; precise dimensions depend

on the actual equipment fit. All dimensions are given in millimetres unless otherwise stated.

NOTE:

All information, services, dimensions etc., refer only to the

mä~ëã~ä~ÄpóëíÉãNMM, i.e. plasma processing at up to 200 mm wafers in

MESC compatible chambers.

Oxford Instruments Plasma Technology conducts a programme of continual product

development, and reserves the right to change the design and/or specification of equipment

without notice. The details contained in this document were correct at the time of printing

but should be confirmed immediately prior to delivery. Details of the clean room interface

will be advised at the time of delivery.

Installation Data (ICP 180)

Issue 5: June 05 Page 4 of 18 Printed: 22-Mar-06, 6:57