Utah-94-721002-System-Manual.pdf - 第20页
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WARNING
HOT SURFACES - CLOSE CONTACT CAN CAUSE SERIOUS INJURY AND BURNS
Allow sufficient time for heated components (e.g. heated lower electrodes) to cool
to room temperature before carrying out maintenance.
1.3.4.1 During operation of the system some components can become dangerously hot.
Always allow time for these to cool to a safe temperature before handling them.
Components that become hot include electrically heated chambers, chamber
liners, lower electrodes, specimen holders and halogen lamps. Items illuminated by
halogen lamps can also reach very high temperatures.
Note that items such as neutralizers, ion sources, and ICP sources operate at high
temperatures.
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WARNING
COLD OBJECTS - CONTACT CAN CAUSE SERIOUS INJURY TO THE SKIN AND CAN CAUSE
THE SKIN TO ADHERE TO THE COLD OBJECT
Allow sufficient time for cold components (e.g. cryogenically cooled lower
electrodes) to return to room temperature before carrying out maintenance.
If cold objects must be handled, ensure that suitable protective clothing is worn.
1.3.5.1 Beware of the extreme cold produced in refrigerated or cryogenically cooled
systems. Contact with the skin by components at these temperatures can produce
'burns'. Allow the cooling system to reach a safe temperature before attempting
any maintenance tasks.
Components that become cold include cryogenically cooled lower electrodes,
cryogenic pumps and components that use liquid nitrogen.
Health and Safety
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mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety
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Gases are used in the system for venting and purging (N2), for aiding heat transfer (e.g.
helium) and for establishing the process environment (i.e. process gases).
Process gases used in the system are specified dependent on the process for which the system
is designed.
The hazards presented by gases fall into one or more of the following categories:
a) Asphyxiant - replaces Oxygen causing respiration difficulties and eventually death.
Examples of asphyxiants are: Nitrogen, Helium etc..
b) Flammable - can ignite in the presence of heat or arcing.
c) Toxic
d) Corrosive
The following WARNINGS may be applicable to the gases used in your system; it is your
responsibility to be aware of the hazards and take the necessary precautions. Contact your
gas supplier for full details.
WARNING
FLAMMABLE GASES - FLAMMABLE MATERIAL CAN IGNITE IN THE PRESENCE OF HEAT
OR ARCING, CAUSING SEVERE INJURY.
After a processing run, the process chamber must be subjected to at least one vent
cycle before any maintenance work is carried out.
Ensure that the gas lines have been purged before removing or loosening
components.
Wear personal protective equipment as necessary.
WARNING
TOXIC GASES - CONTACT CAN CAUSE DEATH OR SERIOUS INJURY
After a processing run, the process chamber must be subjected to at least two vent
cycles before any maintenance work is carried out.
Ensure that the gas lines have been purged before removing or loosening
components.
Wear personal protective equipment as necessary.
WARNING
CORROSIVE GASES - CONTACT CAN CAUSE SERIOUS INJURY
After a processing run, the process chamber must be subjected to at least two vent
cycles before any maintenance work is carried out.
Ensure that the gas lines have been purged before removing or loosening
components.
Wear personal protective equipment as necessary.
Health and Safety
Issue 11: August 2004 Page 1-8 of 18 Printed:29 May 2005, 06:31
Health and Safety lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= mä~ëã~ä~Ä and fçåÑ~Ä
WARNING
mi^pj^i^_ and flkc^_ SYSTEMS DO NOT PROVIDE ANY EXCESS PRESSURE
REGULATION / PROTECTION FOR PROCESS GASES.
It is the customer’s responsibility to ensure that suitable regulation / protection, in
accordance with all applicable standards, is installed and correctly maintained
external to the system.
1.3.6.1 The effluents of all Plasmalab and Ionfab systems should be considered toxic.
1.3.6.2 Ensure that effluents are extracted into a safe disposal system. The bore of the extraction
pipework must be of a greater internal bore than the pump outlet. Exhaust lines carrying
hazardous gases must not be used for any other purpose.
1.3.6.3 Rotary and turbomolecular pumps MUST always be nitrogen ballasted, if this feature is
provided on the system. For Plasmalab deposition systems, the oil box of the rotary pump
should also be purged. If a flow switch and alarm are needed on any of these lines to
ensure safe operation, they must be installed and regularly maintained.
1.3.6.4 If toxic, flammable or corrosive gases are to be used, the entire system must be installed
in accordance with best practice for the semiconductor production industry.
If no local guidelines are available, the regulations contained in U.S. documents UBC
9.911 (1985) and UFC 51 are recommended reading. Guidance is also contained in ‘The
Safe Storage, Handling and Use of Liquid Gases in the Micro-Electronics Industry’
BCGA/ECIF COP CP18, ISBN 0260 - 4809, available from BCGA or ECIF.
1.3.6.5 If toxic, flammable or corrosive gases are to be used, the entire system must be situated
in a purged or extracted environment with suitable gas detectors.
1.3.6.6 Gas pods supplied by OIPT incorporate a 100mm diameter extraction collar. If toxic,
flammable or corrosive gases are used, extraction facilities must be connected to this
collar. Purge gas extracted from the gas pod should be monitored by a suitable gas
detector to give advance warning of any leakage.
1.3.6.7 Ensure that the purge gas extraction system can withstand corrosion or combustion if
necessary.
1.3.6.8 Make regular checks on the vacuum integrity of the gas lines to reduce the risk of
sudden leaks.
1.3.6.9 Ensure that the system is completely purged BEFORE maintenance is started and suitably
leak tested AFTER maintenance is completed.
1.3.6.10 As far as practicable, shut down gas lines when not in use.
1.3.6.11 Pumps must always be operated in accordance with the manufacturers' manuals and
with Oxford Instruments Plasma Technology engineers' training courses.
Pumps, when fitted with a nitrogen purging facility, must always be purged during a
processing run and for a suitable period after a processing run has finished.
1.3.6.12 Where gas detectors are fitted, their responses should be verified every two weeks (refer
to the manufacturer's manuals).
Health and Safety
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