Utah-94-721002-System-Manual.pdf - 第201页

Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM OK= fåëí~ää~íáçå=áåÑçêã~íáçå= OKN= aáãÉåëáçåë= System dimensions are given in Fig 1, Fig 2 a nd Fig 3. Gas handling component dimensions are gi…

mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data

NK= fåíêçÇìÅíáçå=

This installation specification document gives information about the mä~ëã~ä~ÄpóëíÉãNMM

enable customers to prepare the required environment for the system.

Note that all dimensions shown in these data sheets are typical; precise dimensions depend

on the actual equipment fit. All dimensions are given in millimetres unless otherwise stated.

NOTE:

All information, services, dimensions etc., refer only to the

mä~ëã~ä~ÄpóëíÉãNMM, i.e. plasma processing at up to 200 mm wafers in

MESC compatible chambers.

Oxford Instruments Plasma Technology conducts a programme of continual product

development, and reserves the right to change the design and/or specification of equipment

without notice. The details contained in this document were correct at the time of printing

but should be confirmed immediately prior to delivery. Details of the clean room interface

will be advised at the time of delivery.

Installation Data (ICP 180)

Issue 5: June 05 Page 4 of 18 Printed: 22-Mar-06, 6:57

Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM

OK= fåëí~ää~íáçå=áåÑçêã~íáçå=

OKN= aáãÉåëáçåë=

System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component dimensions are

given in Fig 6, Fig 7 and Fig 8. Pump dimensions are given in Section 6. Heater/chiller

dimensions are given in Section 7.

OKO= tÉáÖÜíë=

Typical weights of system components:

2-frame system: 320 kg

3-frame system: 390 kg

6-line Gas pod: 35 kg

12-line Gas pod: 65 kg

Pumps: See Section 6 (Pump set information).

Heater/chillers: See Section 7 (Heater/chiller information).

OKP= eÉ~í=äç~Ç=

The typical heat load for the clean room installation is:

Operating: 2 kW

Passive: 1.5 kW

Note that these specifications do not include externally sited components, e.g. pumps,

heater/chillers, transformers, etc..

Installation Data (ICP 180)

Printed: 22-Mar-06, 6:57 Page 5 of 18 Issue 5: June 05

mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data

1630

747

550

1516

1592

SERVICE ACCESS

OIPT RECOMMENDS THAT AT LEAST 600mm

SERVICE ACCESS SPACE IS ALLOWED BETWEEN

ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)

AND SERVICEABLE ITEMS, E.G. THE POWER

DISTRIBUTION UNIT.

Fig 1: ICP 180 system layout (3-frame)

NOTE: For services panel details, see Fig 4.

Installation Data (ICP 180)

Issue 5: June 05 Page 6 of 18 Printed: 22-Mar-06, 6:57