Utah-94-721002-System-Manual.pdf - 第202页
mä~ëã~ä~Ä póëíÉãNMM = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data 1630 747 550 1516 1592 SERVICE ACCESS OIPT RECOMMENDS THA T A T LEAST 600mm SERVICE ACCESS SP ACE IS ALLOWED BETWEEN ANY OBST A CLE (E.G . W AL…
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
OK= fåëí~ää~íáçå=áåÑçêã~íáçå=
OKN= aáãÉåëáçåë=
System dimensions are given in Fig 1, Fig 2 and Fig 3. Gas handling component dimensions are
given in Fig 6, Fig 7 and Fig 8. Pump dimensions are given in Section 6. Heater/chiller
dimensions are given in Section 7.
OKO= tÉáÖÜíë=
Typical weights of system components:
2-frame system: 320 kg
3-frame system: 390 kg
6-line Gas pod: 35 kg
12-line Gas pod: 65 kg
Pumps: See Section 6 (Pump set information).
Heater/chillers: See Section 7 (Heater/chiller information).
OKP= eÉ~í=äç~Ç=
The typical heat load for the clean room installation is:
Operating: 2 kW
Passive: 1.5 kW
Note that these specifications do not include externally sited components, e.g. pumps,
heater/chillers, transformers, etc..
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 5 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
1630
747
550
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 1: ICP 180 system layout (3-frame)
NOTE: For services panel details, see Fig 4.
Installation Data (ICP 180)
Issue 5: June 05 Page 6 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
2335
509
550
197
System
Services
panel
A
utomatic
Load Lock
Services
panel
514
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: ICP 180 system layout (3-frame cluster upgradeable)
NOTE: For services panel details, see
Fig 4.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 7 of 18 Issue 5: June 05