Utah-94-721002-System-Manual.pdf - 第203页
Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM 2335 509 550 197 Syste m Servi ces pa ne l A ut omat i c Load Lock Servi ces pa ne l 514 1516 1592 SERVICE ACCESS OIPT RECOM MENDS THA T A T LE…
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
1630
747
550
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 1: ICP 180 system layout (3-frame)
NOTE: For services panel details, see Fig 4.
Installation Data (ICP 180)
Issue 5: June 05 Page 6 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
2335
509
550
197
System
Services
panel
A
utomatic
Load Lock
Services
panel
514
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: ICP 180 system layout (3-frame cluster upgradeable)
NOTE: For services panel details, see
Fig 4.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 7 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
1795
444
550
197
System
Services
panel
A
utomatic
Load Lock
Services
panel
514
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: ICP 180 Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see
Fig 4.
Installation Data (ICP 180)
Issue 5: June 05 Page 8 of 18 Printed: 22-Mar-06, 6:57