Utah-94-721002-System-Manual.pdf - 第204页
mä~ëã~ä~Ä póëíÉãNMM = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data 179 5 444 550 197 Syste m Ser vices pa n e l A ut omat i c Load Lo ck Servi ces pa n e l 514 1516 1592 SERVICE ACCESS OIPT RECO MMENDS T HA T A…
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
2335
509
550
197
System
Services
panel
A
utomatic
Load Lock
Services
panel
514
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 2: ICP 180 system layout (3-frame cluster upgradeable)
NOTE: For services panel details, see
Fig 4.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 7 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
1795
444
550
197
System
Services
panel
A
utomatic
Load Lock
Services
panel
514
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: ICP 180 Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see
Fig 4.
Installation Data (ICP 180)
Issue 5: June 05 Page 8 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
PK= pÉêîáÅÉë=ÅçååÉÅíáçåë=
711
738.5
746
781
816
837
851
886
921
951
956
Distance
to floor
level
385 415 461.5
469
3/8“ SWAGELOK
3/8“ SWAGELOK
3/8“ SWAGELOK
1/4“ SWAGELOK
1/4“ SWAGELOK
1/4“ VCR
(Only used
if a gas ring
is fitted)
1/4“ VCR
TOP ELECTRODE
& AMU COOLING
OUTIN
OUT
IN
OUT
IN
OUTIN
RF GENERATOR COOLING
LOWER ELECTRODE
COOLING
TURBO COOLING
N2 IN
AIR IN
GAS RING
PROCESS
GAS
AIR OUT
CHAMBER BACKING
HELIUM IN
4 MM PUSH-FIT
LEGRIS
Distance to left-hand edge of frame
(viewed from rear of system)
LIQUID N2 IN
1/4” SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
NITROGEN OUT
1/4” SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
HELIUM SERVICE FOR
WAFER COOLING
(IF REQUIRED)
PLC SERVICE
ACCESS CONNECTOR
(THIS IS AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
NOT
Fig 4: ICP 180 services panel
NOTE: The Automatic load lock services panel is similar to that shown above but only the
CHAMBER BACKING connector is used.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 9 of 18 Issue 5: June 05