Utah-94-721002-System-Manual.pdf - 第205页
Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM PK= pÉêîáÅÉë=ÅçååÉÅíáçåë= 711 738.5 746 781 816 837 851 886 921 951 956 Di st an ce to floor leve l 385 415 461.5 469 3/8“ S W AG ELO K 3/8“ S …
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1795
444
550
197
System
Services
panel
A
utomatic
Load Lock
Services
panel
514
1516
1592
SERVICE ACCESS
OIPT RECOMMENDS THAT AT LEAST 600mm
SERVICE ACCESS SPACE IS ALLOWED BETWEEN
ANY OBSTACLE (E.G. WALLS, PARTITIONS, ETC.)
AND SERVICEABLE ITEMS, E.G. THE POWER
DISTRIBUTION UNIT.
Fig 3: ICP 180 Layout (2-frame cluster upgradeable)
NOTE: For services panel details, see
Fig 4.
Installation Data (ICP 180)
Issue 5: June 05 Page 8 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
PK= pÉêîáÅÉë=ÅçååÉÅíáçåë=
711
738.5
746
781
816
837
851
886
921
951
956
Distance
to floor
level
385 415 461.5
469
3/8“ SWAGELOK
3/8“ SWAGELOK
3/8“ SWAGELOK
1/4“ SWAGELOK
1/4“ SWAGELOK
1/4“ VCR
(Only used
if a gas ring
is fitted)
1/4“ VCR
TOP ELECTRODE
& AMU COOLING
OUTIN
OUT
IN
OUT
IN
OUTIN
RF GENERATOR COOLING
LOWER ELECTRODE
COOLING
TURBO COOLING
N2 IN
AIR IN
GAS RING
PROCESS
GAS
AIR OUT
CHAMBER BACKING
HELIUM IN
4 MM PUSH-FIT
LEGRIS
Distance to left-hand edge of frame
(viewed from rear of system)
LIQUID N2 IN
1/4” SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
NITROGEN OUT
1/4” SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
HELIUM SERVICE FOR
WAFER COOLING
(IF REQUIRED)
PLC SERVICE
ACCESS CONNECTOR
(THIS IS AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
NOT
Fig 4: ICP 180 services panel
NOTE: The Automatic load lock services panel is similar to that shown above but only the
CHAMBER BACKING connector is used.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 9 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
POWER DISTRIBUTION
UNIT
(REMOVABLE COVER)
COOLING
FAN
SKT 7 SKT 10A
SKT 9
SKT 17SKT 16SKT 8
PUMP
PURGE
HEATER/
CHILLER
SKT 10
EARTH TERMINAL
SYSTEM POWER
CABLE GLAND
(CABLE LENGTH
= 4 METRES)
LOW VOLTAGE
FUSES
SKT 7
AUXILIARY
EMERGENCY OFF
SWITCH CONNECTOR
4-WAY BICC
PIN A EMO 1*
PIN B +24V
PIN C 0V
PIN D EMO 2*
(NOTE: EMO 1 & 2
MUST BE LINKED)
*EMO = EMERGENCY
OFF
2 AMP
FS1
+15V -15V +24V
FS2 FS3
2 AMP 2 AMP
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO LOAD LOCK
ROTARY PUMP
SOCKET 10A
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO ROTARY
PUMP 2
SOCKET 9
12
3 4
PHASE 1
PHASE 2
PHASE 3
SUPPLY TO ROTARY
PUMP 1
SOCKET 10
1
2 E
SUPPLY TO ROTARY
PUMP OIL FILTER
SOCKET 17
415V
Pin 1 Live
Pin 2 Neutral
Pin E Earth
208V
Pin 1 Phase 1
Pin 2 Phase 2
Pin E Phase 3
Fig 5: Electrical connections
Installation Data (ICP 180)
Issue 5: June 05 Page 10 of 18 Printed: 22-Mar-06, 6:57