Utah-94-721002-System-Manual.pdf - 第206页

mä~ëã~ä~Ä póëíÉãNMM = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data POWER DISTR IBUTION UNIT (REMOV ABLE COVER) COOLING FAN SKT 7 SKT 10A SKT 9 SKT 17 SKT 16 SKT 8 PUMP PURGE HEAT ER/ CHILLE R SKT 10 EARTH TERMI…

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Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
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711
738.5
746
781
816
837
851
886
921
951
956
Distance
to floor
level
385 415 461.5
469
3/8“ SWAGELOK
3/8“ SWAGELOK
3/8“ SWAGELOK
1/4“ SWAGELOK
1/4“ SWAGELOK
1/4“ VCR
(Only used
if a gas ring
is fitted)
1/4“ VCR
TOP ELECTRODE
& AMU COOLING
OUTIN
OUT
IN
OUT
IN
OUTIN
RF GENERATOR COOLING
LOWER ELECTRODE
COOLING
TURBO COOLING
N2 IN
AIR IN
GAS RING
PROCESS
GAS
AIR OUT
CHAMBER BACKING
HELIUM IN
4 MM PUSH-FIT
LEGRIS
Distance to left-hand edge of frame
(viewed from rear of system)
LIQUID N2 IN
1/4” SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
NITROGEN OUT
1/4” SWAGELOK
INSULATED
FITTING (CRYO
TABLE OPTION)
HELIUM SERVICE FOR
WAFER COOLING
(IF REQUIRED)
PLC SERVICE
ACCESS CONNECTOR
(THIS IS AN
ALTERNATIVE PC
COMMUNICATIONS
CONNECTION)
NOT
Fig 4: ICP 180 services panel
NOTE: The Automatic load lock services panel is similar to that shown above but only the
CHAMBER BACKING connector is used.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 9 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
POWER DISTRIBUTION
UNIT
(REMOVABLE COVER)
COOLING
FAN
SKT 7 SKT 10A
SKT 9
SKT 17SKT 16SKT 8
PUMP
PURGE
HEATER/
CHILLER
SKT 10
EARTH TERMINAL
SYSTEM POWER
CABLE GLAND
(CABLE LENGTH
= 4 METRES)
LOW VOLTAGE
FUSES
SKT 7
AUXILIARY
EMERGENCY OFF
SWITCH CONNECTOR
4-WAY BICC
PIN A EMO 1*
PIN B +24V
PIN C 0V
PIN D EMO 2*
(NOTE: EMO 1 & 2
MUST BE LINKED)
*EMO = EMERGENCY
OFF
2 AMP
FS1
+15V -15V +24V
FS2 FS3
2 AMP 2 AMP
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO LOAD LOCK
ROTARY PUMP
SOCKET 10A
1
2
3
4
5
6
PHASE 1
PHASE 2
PHASE 3
SPARE
SPARE
NEUTRAL
SUPPLY TO ROTARY
PUMP 2
SOCKET 9
12
3 4
PHASE 1
PHASE 2
PHASE 3
SUPPLY TO ROTARY
PUMP 1
SOCKET 10
1
2 E
SUPPLY TO ROTARY
PUMP OIL FILTER
SOCKET 17
415V
Pin 1 Live
Pin 2 Neutral
Pin E Earth
208V
Pin 1 Phase 1
Pin 2 Phase 2
Pin E Phase 3
Fig 5: Electrical connections
Installation Data (ICP 180)
Issue 5: June 05 Page 10 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
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IMPORTANT OIPT gas pods typically weigh >40kg. If you intend fixing your gas pod to a wall,
ensure the wall and gas pod fixings are sturdy enough to bear at least four times
the weight of the gas pod. Periodically, e.g. annually, check the gas pod and its
fixings are secure.
IN
OUT
COMPRESSED
AIR
(4mm PUSH-FIT)
GAS OUT
TO SYSTEM
GAS LINE 1
(SEE NOTE 2)
CONTROL CABLE
TO MAIN UNIT
(3 METRES LONG)
600
70.6
600
200
100
28.5
40
1
2
3
4
5
6
70.6
NOTES:
1) MAXIMUM DISTANCE OF GAS
POD FROM MAIN UNIT IS
3 METRES
2) ALL GAS LINES ARE 1/4“
STAINLESS STEEL TUBE,
PROTRUDING 160 mm
FROM POD FOR WELDING
3) CLEAN GAS LINE CAN BE
MFC CONTROLLED (THIS WILL
OCCUPY ONE GAS LINE
POSITION)
EXTRACTION
COLLAR
440
8080
75
9mm Diameter
for M8 screws
Location of fixing holes
Fig 6: 6-line gas pod
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 11 of 18 Issue 5: June 05