Utah-94-721002-System-Manual.pdf - 第211页
Installation Data = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~Ä póëíÉãNMM RKR= káíêçÖÉå=êÉèìáêÉãÉåí= Function Connection Parameter Specification Flow 10 lpm (0.4 cfm) System N 2 ¼” stainless steel Swagelok Pressure 3.…
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The required services are listed in the following sub-sections. For full details of services
specifications including connection diagrams, electrical connection schematic etc., read in
conjunction with the Oxford Instruments Plasma Technology ‘Services Specifications for
Plasmalab and Ionfab Systems’ document.
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Function Connection Parameter Specification
Voltage 208Vac ±10%
Current 50 A
Frequency 50 / 60 Hz
System electrical
supply (208V
system)
Cable (4 meters
long)
Phases 3 phase, N + E
Voltage 380Vac –10% to 415Vac
+6%
Current 50 A
Frequency 50 / 60 Hz
System electrical
supply (415V
system)
Cable (4 meters
long)
Phases 3 phase, N + E
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Function Connection Parameter Specification
Flow 1 lpm (0.27 gpm (US)) Process turbo
1
/
4
” stainless steel
Swagelok
Temperature 15 - 25°C (59 - 77°F)
Flow 8 lpm (2.12 gpm (US)) RF Generator and
ICP
3
/8” stainless steel
Swagelok
Temperature 10 - 25°C (50 - 77°F)
Flow 2 lpm (0.53 gpm (US)) ICP & AMU
3
/8” stainless steel
Swagelok
Temperature 10 - 25°C (50 - 77°F)
Flow 1 lpm (0.27 gpm (US)) Load lock turbo (if
required)
1
/
4
” stainless steel
Swagelok
Temperature 15 - 25°C (59 - 77°F)
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Function Connection Parameter Specification
Flow 2 lpm (0.53 gpm (US)) Liquid cooled lower
electrode
3
/8” stainless steel
Swagelok to heater /
chiller unit
Temperature As required by process
LN2 Cryo cooled
lower electrode
¼” stainless steel
Swagelok to dewar
Flow As required by process
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Function Connection Parameter Specification
Flow 5 lpm (0.2 cfm)
(combined with gas
pod)
System CDA 4mm push-fit Legris
Pressure 4.0 – 6.0 Bar (60 – 90
psi)
Flow 5 lpm (0.2 cfm)
(combined with system)
Gas pod CDA 4mm push-fit Legris
Pressure 4.0 – 6.0 Bar (60 – 90
psi)
Installation Data (ICP 180)
Issue 5: June 05 Page 14 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
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Function Connection Parameter Specification
Flow 10 lpm (0.4 cfm) System N
2
¼” stainless steel
Swagelok
Pressure 3.0 Bar (45 psi)
minimum
Flow Refer to sub-section 6.1
Rotary pump purging
Rotary pump purge ¼” stainless steel
Swagelok typically
Pressure Refer to
sub-section 6.1
Rotary pump purging
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Function Connection Parameter Specification
Process gas in ¼” stainless steel
welded pipe at gas
pod, ¼” stainless
steel VCR at system.
Pressure 2.0 – 3.0 Bar (30 – 45
psi)
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Function Connection Parameter Specification
Helium in ¼” stainless steel
Swagelok
Pressure 2.0 – 3.0 Bar (30 – 45 psi)
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Function Connection Parameter Specification
ICP180 100mm (4”) tube Flow 1 m
3
/hour (0.6 cfm)
Gas pod 100mm (4”) tube Flow 6-line gas pod – 1
m
3
/hour (0.6 cfm)
12-line gas pod – 3
m
3
/hour (1.8 cfm)
Rotary pump
exhaust
Refer to Section 6
Pump set
information
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 15 of 18 Issue 5: June 05
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CAUTION
Where the rotary vane or Roots pumps are powered from a mains supply separate
from the mä~ëã~ä~ÄpóëíÉãNMM, a separate 'emergency off' facility must be provided
by the customer.
Available
pump options
Length
mm
Width
mm
Height
mm
Machine
connection
*Pump
outlet
connection
Weight
kg
Power
consumption
kW
Minimum N
2
purge rate
Alcatel 2015C2 462 188 240 NW 25 NW 25 27 0.45 (50Hz)
0.55 (60Hz)
2 litres/minute
Alcatel 2033C2 701 213 348 DN 40 DN 40 76 1.1 (50Hz)
1.3 (60Hz)
2 litres/minute
Alcatel 2063C2 819 264 397 DN 40 DN 40 98 2.2 (50Hz)
2.6 (60Hz)
2 litres/minute
Alcatel ADP
122P
830 390 580 DN 50 DN 40 245 1.5 10 litres/minute
Alcatel
ADS602P
830 390 580 DN 100 DN 40 378 1.8 (50Hz)
2.0 (60Hz)
10 litres/minute
Alcatel ACP
28G
609 185 310 DN 25 ISO K-F 33.5 1.2 1.05
litres/minute
Alcatel RSV 301 880 510 1000 DN 40 DN 63 220 1.1 (50/60Hz) **2 litres/minute
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard stainless steel.
Refer to the OIPT Services Specifications document, sub-section 8.1.
** This figure applies only to the rotary vane pump; the roots blower does not require N
2
purging.
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The requirements for rotary pump purging depend on the process used. Customers should
consult the pump manufacturer for their recommendations.
For Alcatel 2033 and 2063 rotary pumps, the recommended minimum N
2
purge rate is
2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,
4 litres/minute is recommended.
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Available
heater/chiller
options
Length
mm
Width
mm
Height
mm
*Typical
operational
temperature
range
Water
connections
Weight
kg
Electrical
requirements
Neslab RTE-7 445 235 600 0°C to +90°C ¼” Swagelok
fitted
28.6
230V 50Hz or 115V
60Hz, 12A single
phase
Betta-Tech
CU500
610 380 450 -10°C to +70°C ¼” Swagelok
fitted
62
240V 50Hz 8.5A or
110V 60Hz 15A,
single phase
*Standard control range, for other temperature ranges please consult the factory.
IMPORTANT: Heater/chillers should be filled/topped up with Hexid A40 coolant
(Oxford Plasma Technology Part No. G/WTR/SUN/007 for 15 litres). This
product is propylene glycol based and is pre-diluted ready for use.
Refer the OIPT ‘Services Specifications for Plasmalab and Ionfab
systems’ document, sub-section 2.1 for the warranty impact of not
using this product.
Installation Data (ICP 180)
Issue 5: June 05 Page 16 of 18 Printed: 22-Mar-06, 6:57