Utah-94-721002-System-Manual.pdf - 第212页
mä~ëã~ä~Ä póëíÉãNMM = lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data SK= mìãé=ëÉí=áåÑçêã~íáç å= CAUTION Where the rotary vane or Roots pumps are powere d from a mains supply separa te from the mä~ëã~ä~ Ä póëíÉãNM…
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
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Function Connection Parameter Specification
Flow 10 lpm (0.4 cfm) System N
2
¼” stainless steel
Swagelok
Pressure 3.0 Bar (45 psi)
minimum
Flow Refer to sub-section 6.1
Rotary pump purging
Rotary pump purge ¼” stainless steel
Swagelok typically
Pressure Refer to
sub-section 6.1
Rotary pump purging
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Function Connection Parameter Specification
Process gas in ¼” stainless steel
welded pipe at gas
pod, ¼” stainless
steel VCR at system.
Pressure 2.0 – 3.0 Bar (30 – 45
psi)
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Function Connection Parameter Specification
Helium in ¼” stainless steel
Swagelok
Pressure 2.0 – 3.0 Bar (30 – 45 psi)
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Function Connection Parameter Specification
ICP180 100mm (4”) tube Flow 1 m
3
/hour (0.6 cfm)
Gas pod 100mm (4”) tube Flow 6-line gas pod – 1
m
3
/hour (0.6 cfm)
12-line gas pod – 3
m
3
/hour (1.8 cfm)
Rotary pump
exhaust
Refer to Section 6
Pump set
information
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 15 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
SK= mìãé=ëÉí=áåÑçêã~íáçå=
CAUTION
Where the rotary vane or Roots pumps are powered from a mains supply separate
from the mä~ëã~ä~ÄpóëíÉãNMM, a separate 'emergency off' facility must be provided
by the customer.
Available
pump options
Length
mm
Width
mm
Height
mm
Machine
connection
*Pump
outlet
connection
Weight
kg
Power
consumption
kW
Minimum N
2
purge rate
Alcatel 2015C2 462 188 240 NW 25 NW 25 27 0.45 (50Hz)
0.55 (60Hz)
2 litres/minute
Alcatel 2033C2 701 213 348 DN 40 DN 40 76 1.1 (50Hz)
1.3 (60Hz)
2 litres/minute
Alcatel 2063C2 819 264 397 DN 40 DN 40 98 2.2 (50Hz)
2.6 (60Hz)
2 litres/minute
Alcatel ADP
122P
830 390 580 DN 50 DN 40 245 1.5 10 litres/minute
Alcatel
ADS602P
830 390 580 DN 100 DN 40 378 1.8 (50Hz)
2.0 (60Hz)
10 litres/minute
Alcatel ACP
28G
609 185 310 DN 25 ISO K-F 33.5 1.2 1.05
litres/minute
Alcatel RSV 301 880 510 1000 DN 40 DN 63 220 1.1 (50/60Hz) **2 litres/minute
* All fittings and pipework connected to the rotary pump exhaust must be made from industry standard stainless steel.
Refer to the OIPT Services Specifications document, sub-section 8.1.
** This figure applies only to the rotary vane pump; the roots blower does not require N
2
purging.
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The requirements for rotary pump purging depend on the process used. Customers should
consult the pump manufacturer for their recommendations.
For Alcatel 2033 and 2063 rotary pumps, the recommended minimum N
2
purge rate is
2 litres/minute at a pressure of 2bar to 5bar. For highly corrosive or pyrophoric gases,
4 litres/minute is recommended.
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Available
heater/chiller
options
Length
mm
Width
mm
Height
mm
*Typical
operational
temperature
range
Water
connections
Weight
kg
Electrical
requirements
Neslab RTE-7 445 235 600 0°C to +90°C ¼” Swagelok
fitted
28.6
230V 50Hz or 115V
60Hz, 12A single
phase
Betta-Tech
CU500
610 380 450 -10°C to +70°C ¼” Swagelok
fitted
62
240V 50Hz 8.5A or
110V 60Hz 15A,
single phase
*Standard control range, for other temperature ranges please consult the factory.
IMPORTANT: Heater/chillers should be filled/topped up with Hexid A40 coolant
(Oxford Plasma Technology Part No. G/WTR/SUN/007 for 15 litres). This
product is propylene glycol based and is pre-diluted ready for use.
Refer the OIPT ‘Services Specifications for Plasmalab and Ionfab
systems’ document, sub-section 2.1 for the warranty impact of not
using this product.
Installation Data (ICP 180)
Issue 5: June 05 Page 16 of 18 Printed: 22-Mar-06, 6:57
Installation Data= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó mä~ëã~ä~ÄpóëíÉãNMM
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There are two types of interlocks used on the=mä~ëã~ä~ÄpóëíÉãNMM; hardware and software.
In all areas, the hardware interlock will override any software interlock. The hardware
interlocks, and their effect on the system components in the case of an interlock becoming
open circuit are as follows:
The electrical interlocks are divided into two circuits controlling the power to the system.
1) The mains power connection is made to a system Power Distribution Unit. The Power
Distribution Unit will disable all of its power outputs under the following conditions:
a) If the Emergency Off button is pressed.
b) If there is an interruption of the power input to the system.
c) If the Power Distribution Unit external facility interlock sensor link becomes
open circuit.
NOTE:
The Power Distribution Unit external facility interlock sensor
link enables the interlocks of external sensors, e.g. gas
detectors, exhaust scrubbers, etc., to be monitored by the Power
Distribution Unit. External interlock contacts connected to this
link should be voltage free and Normally Closed, i.e. faulting to
an Open Circuit.
2) The system internal 24V supply, comprises a process line and a chamber line:
The 24V process line, which controls the process gases and plasma power supply
units, will be disabled under the following conditions:
a) If the Vacuum Safety Switch is open circuit, i.e. Chamber Pressure > 600
mbar.
b) If the load lock slit valve is OPEN.
The 24V chamber line will be disabled under the following conditions, leaving the system
controller operational, but disabling all system components:
a) If the Water Flow switch is not closed.
b) If the Chamber top is OPEN.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 17 of 18 Issue 5: June 05