Utah-94-721002-System-Manual.pdf - 第214页
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There are two types of interlocks used on the=mä~ëã~ä~ÄpóëíÉãNMM; hardware and software.
In all areas, the hardware interlock will override any software interlock. The hardware
interlocks, and their effect on the system components in the case of an interlock becoming
open circuit are as follows:
The electrical interlocks are divided into two circuits controlling the power to the system.
1) The mains power connection is made to a system Power Distribution Unit. The Power
Distribution Unit will disable all of its power outputs under the following conditions:
a) If the Emergency Off button is pressed.
b) If there is an interruption of the power input to the system.
c) If the Power Distribution Unit external facility interlock sensor link becomes
open circuit.
NOTE:
The Power Distribution Unit external facility interlock sensor
link enables the interlocks of external sensors, e.g. gas
detectors, exhaust scrubbers, etc., to be monitored by the Power
Distribution Unit. External interlock contacts connected to this
link should be voltage free and Normally Closed, i.e. faulting to
an Open Circuit.
2) The system internal 24V supply, comprises a process line and a chamber line:
The 24V process line, which controls the process gases and plasma power supply
units, will be disabled under the following conditions:
a) If the Vacuum Safety Switch is open circuit, i.e. Chamber Pressure > 600
mbar.
b) If the load lock slit valve is OPEN.
The 24V chamber line will be disabled under the following conditions, leaving the system
controller operational, but disabling all system components:
a) If the Water Flow switch is not closed.
b) If the Chamber top is OPEN.
Installation Data (ICP 180)
Printed: 22-Mar-06, 6:57 Page 17 of 18 Issue 5: June 05
mä~ëã~ä~ÄpóëíÉãNMM= lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó Installation Data
Emergency Off / Electrical
Fail
24V Process line 24V Chamber line
Interlock Fail Restore Fail Restore Fail Restore
System/Controller OFF Restart
Required
ON
ON
RF Generator OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered,
NOT active
Process Gases OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered,
NOT active
Automatic
Pressure
Controller Valve
CLOSED
CLOSED
NO
CHANGE
NO
CHANGE
CLOSED
CLOSED
Load lock
Slit Valve
HOLD
HOLD
HOLD
HOLD
HOLD
HOLD
Pumps OFF Pumps must be
restarted
NO
CHANGE
NO
CHANGE
OFF Pumps must
be restarted
Table 2 - Consequences of open circuit interlocks
The other component specific interlocks are incorporated into the software controller,
alerting the operator of conditions such as low process gas flow, pump failure, etc. The
software also monitors the position of the wafer handling mechanisms, ensuring safe
operation.
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UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934 837000
Fax: +44(0)1934 837001
Email:
plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel: +1 978 369 9933
Toll Free +1 800-447-4717
Fax: +1 978 369 8287
Email:
info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122 937175
Email:
plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email:
oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People’s Republic of China (Beijing)
Oxford Instruments China
Room 714, Office Tower 3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 106518 8160/1/2
Fax: +86 106518 8155
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
People’s Republic of China
(Shanghai)
Oxford Instruments China
Room 14-F, No.1 Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax: +86 216360 8535
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte. Ltd
371 Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No 23 Jing-Shang 19
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Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Installation Data (ICP 180)
Issue 5: June 05 Page 18 of 18 Printed: 22-Mar-06, 6:57
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1 Rotameters....................................................................................................................................... 2
1.1 Rotameter types........................................................................................................................................2
1.2 Setting the required purge flow rate......................................................................................................3
1.3 Flow versus scale reading graphs.............................................................................................................4
Fig 1: Typical rotameter.........................................................................................................................................2
Rotameter Data
Printed: 2-Jul-05, 11:43 Page 1 of 4 Issue 1: August 03