Utah-94-721002-System-Manual.pdf - 第215页
System Manual lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉ ÅÜåçäçÖó== ^ää=lfmq=póëíÉãë ^ééÉåÇáñ=o= oçí~ãÉí Éê=Ç~í~= = = = 1 Rotameters .....................................................................................................…
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Emergency Off / Electrical
Fail
24V Process line 24V Chamber line
Interlock Fail Restore Fail Restore Fail Restore
System/Controller OFF Restart
Required
ON
ON
RF Generator OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered,
NOT active
Process Gases OFF Powered, NOT
active
OFF Powered,
NOT active
OFF Powered,
NOT active
Automatic
Pressure
Controller Valve
CLOSED
CLOSED
NO
CHANGE
NO
CHANGE
CLOSED
CLOSED
Load lock
Slit Valve
HOLD
HOLD
HOLD
HOLD
HOLD
HOLD
Pumps OFF Pumps must be
restarted
NO
CHANGE
NO
CHANGE
OFF Pumps must
be restarted
Table 2 - Consequences of open circuit interlocks
The other component specific interlocks are incorporated into the software controller,
alerting the operator of conditions such as low process gas flow, pump failure, etc. The
software also monitors the position of the wafer handling mechanisms, ensuring safe
operation.
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UK
Oxford Instruments Plasma Technolgy
North End, Yatton,
Bristol, BS49 4AP
Tel: +44(0)1934 837000
Fax: +44(0)1934 837001
Email:
plasma.technology@oxinst.co.uk
Web: www.oxford-
instruments.com/plmchp5.htm
USA
Oxford Instruments Inc.
130A Baker Avenue Extension
Concord, MA 01742
Tel: +1 978 369 9933
Toll Free +1 800-447-4717
Fax: +1 978 369 8287
Email:
info@ma.oxinst.com
Germany
Oxford Instruments GmbH
Otto-von-Guericke Ring 10,
D-65205 Wiesbaden
Tel: +49(0)6122 937161
Fax: +49(0)6122 937175
Email:
plasma@oxford.de
Japan
Oxford Instruments K.K.
2-11-6 Tomioka
Koto-ku, Tokyo 135-0047
Tel: +81-3-5245-3261
Fax: +81-3-5245-4466
Email:
oikkpt@oxinst.co.jp
Web: www.oxford-instruments.jp
People’s Republic of China (Beijing)
Oxford Instruments China
Room 714, Office Tower 3,
Henderson Center,
No. 18 Jianguomennei Ave,
Dongcheng District,
Beijing 100005
Tel: +86 106518 8160/1/2
Fax: +86 106518 8155
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
People’s Republic of China
(Shanghai)
Oxford Instruments China
Room 14-F, No.1 Plaza
800 Nanjing East Road
Shanghai 200001
Tel: +86 216360 8530
Fax: +86 216360 8535
Email:
ptsales@oichina.cn
Web: www.oxford-instruments.com.cn
Singapore
Oxford Instruments Pte. Ltd
371 Beach Road,
#02-07 Keypoint
Singapore 199597
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Taiwan
Oxford Instruments Overseas
Marketing Ltd.
1F, No 23 Jing-Shang 19
th
Street,
Hsinchu, Taiwan
Tel: +65 6337 6848
Fax: +65 6337 6286
Email:
oipt.sales@oxford-
instruments.com.sg
Installation Data (ICP 180)
Issue 5: June 05 Page 18 of 18 Printed: 22-Mar-06, 6:57
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1 Rotameters....................................................................................................................................... 2
1.1 Rotameter types........................................................................................................................................2
1.2 Setting the required purge flow rate......................................................................................................3
1.3 Flow versus scale reading graphs.............................................................................................................4
Fig 1: Typical rotameter.........................................................................................................................................2
Rotameter Data
Printed: 2-Jul-05, 11:43 Page 1 of 4 Issue 1: August 03
^ää=lfmq=póëíÉãë lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó== System Manual
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A rotameter is a manually controlled variable valve/indicating tube, used by OIPT to manually set the flow
rate
1
for various gas supplies. For example, purge flow rates for turbomolecular
2
, rotary vane and dry
pumps, glove boxes and etch gas supplies for process chamber cleaning.
Flow control
knob
Graduated
scale
Ball float
Tube type number
is marked on this
side of the tube
Fig 1: Typical rotameter
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The models of rotameter used for setting purge gas flows on OIPT equipment is fitted with a common
scale, reading from 0 to 6 as flow is varied from zero to full scale. The full-scale flow depends on:
• The tube type (marked on the tube itself)
• The ball material
• The gas type
• Temperature
• Pressure
The full-scale flows given in the following table are for 20° C, 1 atmosphere pressure, air or nitrogen gas.
OIPT part Tube number Ball material Normal use Full scale flow
G/GAS/ROT/050 A125-3 Glass Turbo pump purge 53 sccm
G/GAS/ROT/25L A250-4 Carboloy Rotary pump purge, PECVD 27.5 slpm
G/GAS/ROT/40L A250-6 Stainless steel Pump exhaust purge 43.4 slpm
G/GAS/ROT/800 A125-7 Stainless steel CF4/O2 ‘clean gas’ metering 850 sccm
G/GAS/ROT/900 A250-1 Stainless steel Rotary pump purge, etch,
PECVD
4.4 slpm
1
Flow rates are quoted in either standard cubic centimetres per minute (sccm) or standard litres per minute (slpm).
2
In most OIPT systems, turbomolecular pump purge flows are set automatically and monitored by the system software via a flow
meter: these systems do not incorporate a rotameter for the turbo pump purge.
Rotameter Data
Issue 1: August 03 Page 2 of 4 Printed: 2-Jul-05, 11:43