Utah-94-721002-System-Manual.pdf - 第22页
mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety NKPKT= j~íÉêá~äë = 1.3.7.1 Materials used in the construction of the system are in a safe state when installed. However, fluorine-containing ma…
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WARNING
mi^pj^i^_ and flkc^_ SYSTEMS DO NOT PROVIDE ANY EXCESS PRESSURE
REGULATION / PROTECTION FOR PROCESS GASES.
It is the customer’s responsibility to ensure that suitable regulation / protection, in
accordance with all applicable standards, is installed and correctly maintained
external to the system.
1.3.6.1 The effluents of all Plasmalab and Ionfab systems should be considered toxic.
1.3.6.2 Ensure that effluents are extracted into a safe disposal system. The bore of the extraction
pipework must be of a greater internal bore than the pump outlet. Exhaust lines carrying
hazardous gases must not be used for any other purpose.
1.3.6.3 Rotary and turbomolecular pumps MUST always be nitrogen ballasted, if this feature is
provided on the system. For Plasmalab deposition systems, the oil box of the rotary pump
should also be purged. If a flow switch and alarm are needed on any of these lines to
ensure safe operation, they must be installed and regularly maintained.
1.3.6.4 If toxic, flammable or corrosive gases are to be used, the entire system must be installed
in accordance with best practice for the semiconductor production industry.
If no local guidelines are available, the regulations contained in U.S. documents UBC
9.911 (1985) and UFC 51 are recommended reading. Guidance is also contained in ‘The
Safe Storage, Handling and Use of Liquid Gases in the Micro-Electronics Industry’
BCGA/ECIF COP CP18, ISBN 0260 - 4809, available from BCGA or ECIF.
1.3.6.5 If toxic, flammable or corrosive gases are to be used, the entire system must be situated
in a purged or extracted environment with suitable gas detectors.
1.3.6.6 Gas pods supplied by OIPT incorporate a 100mm diameter extraction collar. If toxic,
flammable or corrosive gases are used, extraction facilities must be connected to this
collar. Purge gas extracted from the gas pod should be monitored by a suitable gas
detector to give advance warning of any leakage.
1.3.6.7 Ensure that the purge gas extraction system can withstand corrosion or combustion if
necessary.
1.3.6.8 Make regular checks on the vacuum integrity of the gas lines to reduce the risk of
sudden leaks.
1.3.6.9 Ensure that the system is completely purged BEFORE maintenance is started and suitably
leak tested AFTER maintenance is completed.
1.3.6.10 As far as practicable, shut down gas lines when not in use.
1.3.6.11 Pumps must always be operated in accordance with the manufacturers' manuals and
with Oxford Instruments Plasma Technology engineers' training courses.
Pumps, when fitted with a nitrogen purging facility, must always be purged during a
processing run and for a suitable period after a processing run has finished.
1.3.6.12 Where gas detectors are fitted, their responses should be verified every two weeks (refer
to the manufacturer's manuals).
Health and Safety
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mä~ëã~ä~Ä and fçåÑ~Ä lñÑçêÇ=fåëíêìãÉåíë=mä~ëã~=qÉÅÜåçäçÖó= Health and Safety
NKPKT= j~íÉêá~äë=
1.3.7.1 Materials used in the construction of the system are in a safe state when installed.
However, fluorine-containing materials may be used as O-rings (e.g. Viton™
materials), as electrical insulation or as electrical isolation block (e.g. Teflon ™ or
other tfe or ptfe material) or as lubricating grease or fluid (e.g. Fomblin™,
Krytox™ or the NCI™ range from Leybold) If any of these materials are over-
heated, hazardous materials are created that can result in the loss of a limb or
death.
1.3.7.2 Very great care must be taken to ensure that Perfluoro-elastomer (Viton™) O-rings
are not exposed to high temperatures. If overheated, decomposition takes place,
producing a highly acidic residue containing hydrofluoric acid (HF).
If there is any evidence that a Viton™ O-ring could have been subjected to
temperatures in excess of 300°C the following actions must be carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the O-ring and
dispose of it in accordance with local Health and Safety
regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Fit a new O-ring.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
1.3.7.3 Teflon™ and other tfe materials. Very great care must be taken to ensure that
Teflon™ and other tfe or ptfe materials are not exposed to high temperatures. If
overheated, decomposition takes place, producing volatile fluorine containing
components.
If there is any evidence that any Teflon™ or other tfe or ptfe material could have
been subjected to temperatures in excess of 300°C the following actions must be
carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the decomposed
material and dispose of it in accordance with local Health and
Safety regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Fit a new component.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
Health and Safety
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Note that swarf and other pieces of material for disposal must be disposed of with
great care and must be kept well away from fire, from cigarettes and other
smoking materials.
1.3.7.4 PFPE lubricating fluids. Very great care must be taken to ensure that PFPE fluids (e.g.
Fomblin™, Krytox™ NCI™ etc) are not exposed to high temperatures. If overheated,
decomposition takes place, producing volatile fluorine containing components.
If there is any evidence that any PFPE lubricating fluids could have been subjected to
temperatures in excess of 300°C the following actions must be carried out:
(a) Consult a competent authority regarding the following items (b) to
(e).
(b) Wearing suitable protective clothing, remove the decomposed
material and dispose of it in accordance with local Health and
Safety regulations.
(c) Wearing suitable protective clothing, thoroughly clean the
contaminated area, disposing of any residue in accordance with
local Health and Safety regulations.
(d) Replace with fresh grease or fluid.
(e) Investigate the cause of the overheating and review operating
procedures and control systems to prevent a recurrence.
Note that all PFPE material, including spillages of fresh fluid must be disposed of
with great care and must be kept well away from fire, from cigarettes and other
smoking materials.
Health and Safety
Printed:29 May 2005, 06:31 Page 1-11 of 18 Issue 11: August 2004